A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on Alignment Airgap Dielectric
Flexible capacitive pressure sensors with a simple structure and low power consumption are attracting attention, owing to their wide range of applications in wearable electronic devices. However, it is difficult to manufacture pressure sensors with high sensitivity, wide detection range, and low det...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-09-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/22/19/7390 |
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| author | Soo-Wan Kim Geum-Yoon Oh Kang-In Lee Young-Jin Yang Jeong-Beom Ko Young-Woo Kim Young-Sun Hong |
| author_facet | Soo-Wan Kim Geum-Yoon Oh Kang-In Lee Young-Jin Yang Jeong-Beom Ko Young-Woo Kim Young-Sun Hong |
| author_sort | Soo-Wan Kim |
| collection | DOAJ |
| description | Flexible capacitive pressure sensors with a simple structure and low power consumption are attracting attention, owing to their wide range of applications in wearable electronic devices. However, it is difficult to manufacture pressure sensors with high sensitivity, wide detection range, and low detection limits. We developed a highly sensitive and flexible capacitive pressure sensor based on the porous Ecoflex, which has an aligned airgap structure and can be manufactured by simply using a mold and a micro-needle. The existence of precisely aligned airgap structures significantly improved the sensor sensitivity compared to other dielectric structures without airgaps. The proposed capacitive pressure sensor with an alignment airgap structure supports a wide range of working pressures (20–100 kPa), quick response time (≈100 ms), high operational stability, and low-pressure detection limit (20 Pa). Moreover, we also studied the application of pulse wave monitoring in wearable sensors, exhibiting excellent performance in wearable devices that detect pulse waves before and after exercise. The proposed pressure sensor is applicable in electronic skin and wearable medical assistive devices owing to its excellent functional features. |
| first_indexed | 2024-03-09T21:10:56Z |
| format | Article |
| id | doaj.art-3db0378798ff49ab8dcb3d2241eef543 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-09T21:10:56Z |
| publishDate | 2022-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-3db0378798ff49ab8dcb3d2241eef5432023-11-23T21:48:23ZengMDPI AGSensors1424-82202022-09-012219739010.3390/s22197390A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on Alignment Airgap DielectricSoo-Wan Kim0Geum-Yoon Oh1Kang-In Lee2Young-Jin Yang3Jeong-Beom Ko4Young-Woo Kim5Young-Sun Hong6Sustainable Technology and Wellness R&D Group, Korea Institute of Industrial Technology (KITECH), Jeju 63243, KoreaSustainable Technology and Wellness R&D Group, Korea Institute of Industrial Technology (KITECH), Jeju 63243, KoreaInstitute of Advanced Technology Development, Hyundai Motor Co., Seongnam 13529, KoreaSustainable Technology and Wellness R&D Group, Korea Institute of Industrial Technology (KITECH), Jeju 63243, KoreaSustainable Technology and Wellness R&D Group, Korea Institute of Industrial Technology (KITECH), Jeju 63243, KoreaSustainable Technology and Wellness R&D Group, Korea Institute of Industrial Technology (KITECH), Jeju 63243, KoreaSustainable Technology and Wellness R&D Group, Korea Institute of Industrial Technology (KITECH), Jeju 63243, KoreaFlexible capacitive pressure sensors with a simple structure and low power consumption are attracting attention, owing to their wide range of applications in wearable electronic devices. However, it is difficult to manufacture pressure sensors with high sensitivity, wide detection range, and low detection limits. We developed a highly sensitive and flexible capacitive pressure sensor based on the porous Ecoflex, which has an aligned airgap structure and can be manufactured by simply using a mold and a micro-needle. The existence of precisely aligned airgap structures significantly improved the sensor sensitivity compared to other dielectric structures without airgaps. The proposed capacitive pressure sensor with an alignment airgap structure supports a wide range of working pressures (20–100 kPa), quick response time (≈100 ms), high operational stability, and low-pressure detection limit (20 Pa). Moreover, we also studied the application of pulse wave monitoring in wearable sensors, exhibiting excellent performance in wearable devices that detect pulse waves before and after exercise. The proposed pressure sensor is applicable in electronic skin and wearable medical assistive devices owing to its excellent functional features.https://www.mdpi.com/1424-8220/22/19/7390capacitive pressure sensoralignment airgap dielectricflexible sensorhigh sensitivity |
| spellingShingle | Soo-Wan Kim Geum-Yoon Oh Kang-In Lee Young-Jin Yang Jeong-Beom Ko Young-Woo Kim Young-Sun Hong A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on Alignment Airgap Dielectric Sensors capacitive pressure sensor alignment airgap dielectric flexible sensor high sensitivity |
| title | A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on Alignment Airgap Dielectric |
| title_full | A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on Alignment Airgap Dielectric |
| title_fullStr | A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on Alignment Airgap Dielectric |
| title_full_unstemmed | A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on Alignment Airgap Dielectric |
| title_short | A Highly Sensitive and Flexible Capacitive Pressure Sensor Based on Alignment Airgap Dielectric |
| title_sort | highly sensitive and flexible capacitive pressure sensor based on alignment airgap dielectric |
| topic | capacitive pressure sensor alignment airgap dielectric flexible sensor high sensitivity |
| url | https://www.mdpi.com/1424-8220/22/19/7390 |
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