Optically Clear and Resilient Free-Form µ-Optics 3D-Printed via Ultrafast Laser Lithography

We introduce optically clear and resilient free-form micro-optical components of pure (non-photosensitized) organic-inorganic SZ2080 material made by femtosecond 3D laser lithography (3DLL). This is advantageous for rapid printing of 3D micro-/nano-optics, including their integration directly onto o...

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Main Authors: Linas Jonušauskas, Darius Gailevičius, Lina Mikoliūnaitė, Danas Sakalauskas, Simas Šakirzanovas, Saulius Juodkazis, Mangirdas Malinauskas
Format: Article
Language:English
Published: MDPI AG 2017-01-01
Series:Materials
Subjects:
Online Access:http://www.mdpi.com/1996-1944/10/1/12
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author Linas Jonušauskas
Darius Gailevičius
Lina Mikoliūnaitė
Danas Sakalauskas
Simas Šakirzanovas
Saulius Juodkazis
Mangirdas Malinauskas
author_facet Linas Jonušauskas
Darius Gailevičius
Lina Mikoliūnaitė
Danas Sakalauskas
Simas Šakirzanovas
Saulius Juodkazis
Mangirdas Malinauskas
author_sort Linas Jonušauskas
collection DOAJ
description We introduce optically clear and resilient free-form micro-optical components of pure (non-photosensitized) organic-inorganic SZ2080 material made by femtosecond 3D laser lithography (3DLL). This is advantageous for rapid printing of 3D micro-/nano-optics, including their integration directly onto optical fibers. A systematic study of the fabrication peculiarities and quality of resultant structures is performed. Comparison of microlens resiliency to continuous wave (CW) and femtosecond pulsed exposure is determined. Experimental results prove that pure SZ2080 is ∼20 fold more resistant to high irradiance as compared with standard lithographic material (SU8) and can sustain up to 1.91 GW/cm2 intensity. 3DLL is a promising manufacturing approach for high-intensity micro-optics for emerging fields in astro-photonics and atto-second pulse generation. Additionally, pyrolysis is employed to homogeneously shrink structures up to 40% by removing organic SZ2080 constituents. This opens a promising route towards downscaling photonic lattices and the creation of mechanically robust glass-ceramic microstructures.
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spelling doaj.art-3e052f6f08c44aafa9e929281f5d5d042022-12-22T03:34:53ZengMDPI AGMaterials1996-19442017-01-011011210.3390/ma10010012ma10010012Optically Clear and Resilient Free-Form µ-Optics 3D-Printed via Ultrafast Laser LithographyLinas Jonušauskas0Darius Gailevičius1Lina Mikoliūnaitė2Danas Sakalauskas3Simas Šakirzanovas4Saulius Juodkazis5Mangirdas Malinauskas6Department of Quantum Electronics, Faculty of Physics, Vilnius University, Saulėtekio Ave. 10, Vilnius LT-10223, LithuaniaDepartment of Quantum Electronics, Faculty of Physics, Vilnius University, Saulėtekio Ave. 10, Vilnius LT-10223, LithuaniaDepartment of Applied Chemistry, Vilnius University, Naugarduko Str. 24, Vilnius LT-03225, LithuaniaDepartment of Applied Chemistry, Vilnius University, Naugarduko Str. 24, Vilnius LT-03225, LithuaniaDepartment of Applied Chemistry, Vilnius University, Naugarduko Str. 24, Vilnius LT-03225, LithuaniaCenter for Micro-Photonics, Faculty of Engineering and Industrial Sciences, Swinburne University of Technology, Hawthorn 3122, AustraliaDepartment of Quantum Electronics, Faculty of Physics, Vilnius University, Saulėtekio Ave. 10, Vilnius LT-10223, LithuaniaWe introduce optically clear and resilient free-form micro-optical components of pure (non-photosensitized) organic-inorganic SZ2080 material made by femtosecond 3D laser lithography (3DLL). This is advantageous for rapid printing of 3D micro-/nano-optics, including their integration directly onto optical fibers. A systematic study of the fabrication peculiarities and quality of resultant structures is performed. Comparison of microlens resiliency to continuous wave (CW) and femtosecond pulsed exposure is determined. Experimental results prove that pure SZ2080 is ∼20 fold more resistant to high irradiance as compared with standard lithographic material (SU8) and can sustain up to 1.91 GW/cm2 intensity. 3DLL is a promising manufacturing approach for high-intensity micro-optics for emerging fields in astro-photonics and atto-second pulse generation. Additionally, pyrolysis is employed to homogeneously shrink structures up to 40% by removing organic SZ2080 constituents. This opens a promising route towards downscaling photonic lattices and the creation of mechanically robust glass-ceramic microstructures.http://www.mdpi.com/1996-1944/10/1/12direct laser writingultrafast laser3D laser lithography3D printinghybrid polymerintegrated micro-opticsoptical damagephotonicspyrolysisceramic 3D structures
spellingShingle Linas Jonušauskas
Darius Gailevičius
Lina Mikoliūnaitė
Danas Sakalauskas
Simas Šakirzanovas
Saulius Juodkazis
Mangirdas Malinauskas
Optically Clear and Resilient Free-Form µ-Optics 3D-Printed via Ultrafast Laser Lithography
Materials
direct laser writing
ultrafast laser
3D laser lithography
3D printing
hybrid polymer
integrated micro-optics
optical damage
photonics
pyrolysis
ceramic 3D structures
title Optically Clear and Resilient Free-Form µ-Optics 3D-Printed via Ultrafast Laser Lithography
title_full Optically Clear and Resilient Free-Form µ-Optics 3D-Printed via Ultrafast Laser Lithography
title_fullStr Optically Clear and Resilient Free-Form µ-Optics 3D-Printed via Ultrafast Laser Lithography
title_full_unstemmed Optically Clear and Resilient Free-Form µ-Optics 3D-Printed via Ultrafast Laser Lithography
title_short Optically Clear and Resilient Free-Form µ-Optics 3D-Printed via Ultrafast Laser Lithography
title_sort optically clear and resilient free form µ optics 3d printed via ultrafast laser lithography
topic direct laser writing
ultrafast laser
3D laser lithography
3D printing
hybrid polymer
integrated micro-optics
optical damage
photonics
pyrolysis
ceramic 3D structures
url http://www.mdpi.com/1996-1944/10/1/12
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