The investigation of chemical vapor deposited copper-based niobium films
The deposition of niobium film on copper with excellent superconducting property at low-temperature conditions, used as superconducting radio frequency (SRF) cavity, is a serious and urgent technical problem to be solved at present. In this work, copper-based niobium (Nb) films with a thickness of 1...
| Main Authors: | , , , , , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
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IOP Publishing
2021-01-01
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| Series: | Materials Research Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2053-1591/abefb1 |
| _version_ | 1797746728837840896 |
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| author | Min Li Guo Pu Yuchuan Luo Zongbiao Ye Jianjun Wei Shuwei Chen Andong Wu Li Yang Kun Zhang Fujun Gou Tongtong Zhu Teng Tan Yuan He Hengxin Guo Jianjun Chen Bo Chen Hongbin Wang |
| author_facet | Min Li Guo Pu Yuchuan Luo Zongbiao Ye Jianjun Wei Shuwei Chen Andong Wu Li Yang Kun Zhang Fujun Gou Tongtong Zhu Teng Tan Yuan He Hengxin Guo Jianjun Chen Bo Chen Hongbin Wang |
| author_sort | Min Li |
| collection | DOAJ |
| description | The deposition of niobium film on copper with excellent superconducting property at low-temperature conditions, used as superconducting radio frequency (SRF) cavity, is a serious and urgent technical problem to be solved at present. In this work, copper-based niobium (Nb) films with a thickness of 1.5–1.8 um, regulating the deposition temperature parameters and gas flow velocity in a tube furnace, were prepared by low-temperature chemical vapor depositing (CVD) method from the reaction between H _2 and Niobium chloride (NbCl _5 ) under pure Ar atmosphere. Fabricated Nb films were characterized by X-ray diffraction, scanning electron microscopy and energy dispersive spectroscopy, respectively. The results showed that the excellent crystalline quality and superconductive performance of Nb films were generated successfully by CVD at low temperatures of 650 °C–700 °C. The preparation process was optimized during deposition and the formation mechanism of Nb films was also discussed in detail. The magnetic moment versus temperature of the Nb sample prepared at 700 °C was also measured and the well-prepared Nb film deposited in the boundary layer region obtains the desired superconducting transition temperature of 9.1 K ± 0.1 K, almost equivalent to that of high pure Nb bulk material. The optimized CVD reaction method of Nb film with favorable morphology and expected superconductive property at low temperature provided a new strategy and technical process in designing the desired copper-based Nb film SRF cavity. |
| first_indexed | 2024-03-12T15:41:00Z |
| format | Article |
| id | doaj.art-3eea802318f348afbd38554275590f2c |
| institution | Directory Open Access Journal |
| issn | 2053-1591 |
| language | English |
| last_indexed | 2024-03-12T15:41:00Z |
| publishDate | 2021-01-01 |
| publisher | IOP Publishing |
| record_format | Article |
| series | Materials Research Express |
| spelling | doaj.art-3eea802318f348afbd38554275590f2c2023-08-09T15:58:01ZengIOP PublishingMaterials Research Express2053-15912021-01-018404640210.1088/2053-1591/abefb1The investigation of chemical vapor deposited copper-based niobium filmsMin Li0https://orcid.org/0000-0001-8519-4948Guo Pu1Yuchuan Luo2Zongbiao Ye3https://orcid.org/0000-0002-0923-3594Jianjun Wei4Shuwei Chen5Andong Wu6Li Yang7Kun Zhang8Fujun Gou9Tongtong Zhu10Teng Tan11Yuan He12Hengxin Guo13Jianjun Chen14Bo Chen15Hongbin Wang16Institute of Atomic and Molecular Physics, Sichuan University , Chengdu 610064, People’s Republic of ChinaInstitute of Nuclear Science and Technology, Sichuan University , Chengdu 610064, People’s Republic of ChinaInstitute of Nuclear Science and Technology, Sichuan University , Chengdu 610064, People’s Republic of ChinaInstitute of Nuclear Science and Technology, Sichuan University , Chengdu 610064, People’s Republic of ChinaInstitute of Atomic and Molecular Physics, Sichuan University , Chengdu 610064, People’s Republic of ChinaCollege of Physics, Sichuan University , Chengdu 610064, People’s Republic of ChinaInstitute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, People’s Republic of ChinaInstitute of Nuclear Science and Technology, Sichuan University , Chengdu 610064, People’s Republic of ChinaInstitute of Nuclear Science and Technology, Sichuan University , Chengdu 610064, People’s Republic of ChinaInstitute of Nuclear Science and Technology, Sichuan University , Chengdu 610064, People’s Republic of ChinaInstitute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, People’s Republic of ChinaInstitute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, People’s Republic of ChinaInstitute of Modern Physics, Chinese Academy of Sciences, Lanzhou 730000, People’s Republic of ChinaInstitute of Atomic and Molecular Physics, Sichuan University , Chengdu 610064, People’s Republic of ChinaInstitute of Nuclear Science and Technology, Sichuan University , Chengdu 610064, People’s Republic of ChinaInstitute of Nuclear Science and Technology, Sichuan University , Chengdu 610064, People’s Republic of ChinaInstitute of Nuclear Science and Technology, Sichuan University , Chengdu 610064, People’s Republic of ChinaThe deposition of niobium film on copper with excellent superconducting property at low-temperature conditions, used as superconducting radio frequency (SRF) cavity, is a serious and urgent technical problem to be solved at present. In this work, copper-based niobium (Nb) films with a thickness of 1.5–1.8 um, regulating the deposition temperature parameters and gas flow velocity in a tube furnace, were prepared by low-temperature chemical vapor depositing (CVD) method from the reaction between H _2 and Niobium chloride (NbCl _5 ) under pure Ar atmosphere. Fabricated Nb films were characterized by X-ray diffraction, scanning electron microscopy and energy dispersive spectroscopy, respectively. The results showed that the excellent crystalline quality and superconductive performance of Nb films were generated successfully by CVD at low temperatures of 650 °C–700 °C. The preparation process was optimized during deposition and the formation mechanism of Nb films was also discussed in detail. The magnetic moment versus temperature of the Nb sample prepared at 700 °C was also measured and the well-prepared Nb film deposited in the boundary layer region obtains the desired superconducting transition temperature of 9.1 K ± 0.1 K, almost equivalent to that of high pure Nb bulk material. The optimized CVD reaction method of Nb film with favorable morphology and expected superconductive property at low temperature provided a new strategy and technical process in designing the desired copper-based Nb film SRF cavity.https://doi.org/10.1088/2053-1591/abefb1superconducting niobium filmschemical vapor depositionhydrogen reductionmicro-structuresuperconducting transition temperature |
| spellingShingle | Min Li Guo Pu Yuchuan Luo Zongbiao Ye Jianjun Wei Shuwei Chen Andong Wu Li Yang Kun Zhang Fujun Gou Tongtong Zhu Teng Tan Yuan He Hengxin Guo Jianjun Chen Bo Chen Hongbin Wang The investigation of chemical vapor deposited copper-based niobium films Materials Research Express superconducting niobium films chemical vapor deposition hydrogen reduction micro-structure superconducting transition temperature |
| title | The investigation of chemical vapor deposited copper-based niobium films |
| title_full | The investigation of chemical vapor deposited copper-based niobium films |
| title_fullStr | The investigation of chemical vapor deposited copper-based niobium films |
| title_full_unstemmed | The investigation of chemical vapor deposited copper-based niobium films |
| title_short | The investigation of chemical vapor deposited copper-based niobium films |
| title_sort | investigation of chemical vapor deposited copper based niobium films |
| topic | superconducting niobium films chemical vapor deposition hydrogen reduction micro-structure superconducting transition temperature |
| url | https://doi.org/10.1088/2053-1591/abefb1 |
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