Laser Thermochemical High-Contrast Recording on Thin Metal Films
Laser-induced thermochemical recording of nano- and microsized structures on thin films has attracted intense interest over the last few decades due to essential applications in the photonics industry. Nevertheless, the relationship between the laser parameters and the properties of the formed oxide...
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MDPI AG
2020-12-01
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author | Elena A. Shakhno Quang D. Nguyen Dmitry A. Sinev Elizaveta V. Matvienko Roman A. Zakoldaev Vadim P. Veiko |
author_facet | Elena A. Shakhno Quang D. Nguyen Dmitry A. Sinev Elizaveta V. Matvienko Roman A. Zakoldaev Vadim P. Veiko |
author_sort | Elena A. Shakhno |
collection | DOAJ |
description | Laser-induced thermochemical recording of nano- and microsized structures on thin films has attracted intense interest over the last few decades due to essential applications in the photonics industry. Nevertheless, the relationship between the laser parameters and the properties of the formed oxide structures, both geometrical and optical, is still implicit. In this work, direct laser interference patterning of the titanium (Ti) film in the oxidative regime was applied to form submicron periodical structures. Depending on the number of laser pulses, the regime of high contrast structures recording was observed with the maximum achievable thickness of the oxide layer. The investigation revealed high transmittance of the formed oxide layers, i.e., the contrast of recorded structures reached up to 90% in the visible range. To analyze the experimental results obtained, a theoretical model was developed based on calculations of the oxide formation dynamics. The model operates on Wagner oxidation law and the corresponding optical properties of the oxide–metal–glass substrate system changing nonlinearly after each pulse. A good agreement of the experimental results with the modeling estimations allowed us to extend the model application to other metals, specifically to those with optically transparent oxides, such as zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), and tantalum (Ta). The performed analysis highlighted the importance of choosing the correct laser parameters due to the complexity and nonlinearity of optical, thermal, and chemical processes in the metal film during its laser-induced oxidation in the air. The developed model allowed selecting the suitable temporal–energetic regimes and predicting the optical characteristics of the structures formed with an accuracy of 10%. The results are promising in terms of their implementation in the photonics industry for the production of optical converters. |
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language | English |
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series | Nanomaterials |
spelling | doaj.art-3f4abcf4a5114151b1029c9a62ba4ab82023-11-21T03:06:09ZengMDPI AGNanomaterials2079-49912020-12-011116710.3390/nano11010067Laser Thermochemical High-Contrast Recording on Thin Metal FilmsElena A. Shakhno0Quang D. Nguyen1Dmitry A. Sinev2Elizaveta V. Matvienko3Roman A. Zakoldaev4Vadim P. Veiko5Faculty of Laser Photonics and Optoelectronics, ITMO University, 197101 Saint Petersburg, RussiaFaculty of Laser Photonics and Optoelectronics, ITMO University, 197101 Saint Petersburg, RussiaFaculty of Laser Photonics and Optoelectronics, ITMO University, 197101 Saint Petersburg, RussiaFaculty of Laser Photonics and Optoelectronics, ITMO University, 197101 Saint Petersburg, RussiaFaculty of Laser Photonics and Optoelectronics, ITMO University, 197101 Saint Petersburg, RussiaFaculty of Laser Photonics and Optoelectronics, ITMO University, 197101 Saint Petersburg, RussiaLaser-induced thermochemical recording of nano- and microsized structures on thin films has attracted intense interest over the last few decades due to essential applications in the photonics industry. Nevertheless, the relationship between the laser parameters and the properties of the formed oxide structures, both geometrical and optical, is still implicit. In this work, direct laser interference patterning of the titanium (Ti) film in the oxidative regime was applied to form submicron periodical structures. Depending on the number of laser pulses, the regime of high contrast structures recording was observed with the maximum achievable thickness of the oxide layer. The investigation revealed high transmittance of the formed oxide layers, i.e., the contrast of recorded structures reached up to 90% in the visible range. To analyze the experimental results obtained, a theoretical model was developed based on calculations of the oxide formation dynamics. The model operates on Wagner oxidation law and the corresponding optical properties of the oxide–metal–glass substrate system changing nonlinearly after each pulse. A good agreement of the experimental results with the modeling estimations allowed us to extend the model application to other metals, specifically to those with optically transparent oxides, such as zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), and tantalum (Ta). The performed analysis highlighted the importance of choosing the correct laser parameters due to the complexity and nonlinearity of optical, thermal, and chemical processes in the metal film during its laser-induced oxidation in the air. The developed model allowed selecting the suitable temporal–energetic regimes and predicting the optical characteristics of the structures formed with an accuracy of 10%. The results are promising in terms of their implementation in the photonics industry for the production of optical converters.https://www.mdpi.com/2079-4991/11/1/67picosecond laser pulsesdirect interference patterningDOEthin metal filmWagner oxidation lawoptical contrast |
spellingShingle | Elena A. Shakhno Quang D. Nguyen Dmitry A. Sinev Elizaveta V. Matvienko Roman A. Zakoldaev Vadim P. Veiko Laser Thermochemical High-Contrast Recording on Thin Metal Films Nanomaterials picosecond laser pulses direct interference patterning DOE thin metal film Wagner oxidation law optical contrast |
title | Laser Thermochemical High-Contrast Recording on Thin Metal Films |
title_full | Laser Thermochemical High-Contrast Recording on Thin Metal Films |
title_fullStr | Laser Thermochemical High-Contrast Recording on Thin Metal Films |
title_full_unstemmed | Laser Thermochemical High-Contrast Recording on Thin Metal Films |
title_short | Laser Thermochemical High-Contrast Recording on Thin Metal Films |
title_sort | laser thermochemical high contrast recording on thin metal films |
topic | picosecond laser pulses direct interference patterning DOE thin metal film Wagner oxidation law optical contrast |
url | https://www.mdpi.com/2079-4991/11/1/67 |
work_keys_str_mv | AT elenaashakhno laserthermochemicalhighcontrastrecordingonthinmetalfilms AT quangdnguyen laserthermochemicalhighcontrastrecordingonthinmetalfilms AT dmitryasinev laserthermochemicalhighcontrastrecordingonthinmetalfilms AT elizavetavmatvienko laserthermochemicalhighcontrastrecordingonthinmetalfilms AT romanazakoldaev laserthermochemicalhighcontrastrecordingonthinmetalfilms AT vadimpveiko laserthermochemicalhighcontrastrecordingonthinmetalfilms |