Laser Thermochemical High-Contrast Recording on Thin Metal Films

Laser-induced thermochemical recording of nano- and microsized structures on thin films has attracted intense interest over the last few decades due to essential applications in the photonics industry. Nevertheless, the relationship between the laser parameters and the properties of the formed oxide...

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Main Authors: Elena A. Shakhno, Quang D. Nguyen, Dmitry A. Sinev, Elizaveta V. Matvienko, Roman A. Zakoldaev, Vadim P. Veiko
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/11/1/67
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author Elena A. Shakhno
Quang D. Nguyen
Dmitry A. Sinev
Elizaveta V. Matvienko
Roman A. Zakoldaev
Vadim P. Veiko
author_facet Elena A. Shakhno
Quang D. Nguyen
Dmitry A. Sinev
Elizaveta V. Matvienko
Roman A. Zakoldaev
Vadim P. Veiko
author_sort Elena A. Shakhno
collection DOAJ
description Laser-induced thermochemical recording of nano- and microsized structures on thin films has attracted intense interest over the last few decades due to essential applications in the photonics industry. Nevertheless, the relationship between the laser parameters and the properties of the formed oxide structures, both geometrical and optical, is still implicit. In this work, direct laser interference patterning of the titanium (Ti) film in the oxidative regime was applied to form submicron periodical structures. Depending on the number of laser pulses, the regime of high contrast structures recording was observed with the maximum achievable thickness of the oxide layer. The investigation revealed high transmittance of the formed oxide layers, i.e., the contrast of recorded structures reached up to 90% in the visible range. To analyze the experimental results obtained, a theoretical model was developed based on calculations of the oxide formation dynamics. The model operates on Wagner oxidation law and the corresponding optical properties of the oxide–metal–glass substrate system changing nonlinearly after each pulse. A good agreement of the experimental results with the modeling estimations allowed us to extend the model application to other metals, specifically to those with optically transparent oxides, such as zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), and tantalum (Ta). The performed analysis highlighted the importance of choosing the correct laser parameters due to the complexity and nonlinearity of optical, thermal, and chemical processes in the metal film during its laser-induced oxidation in the air. The developed model allowed selecting the suitable temporal–energetic regimes and predicting the optical characteristics of the structures formed with an accuracy of 10%. The results are promising in terms of their implementation in the photonics industry for the production of optical converters.
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spelling doaj.art-3f4abcf4a5114151b1029c9a62ba4ab82023-11-21T03:06:09ZengMDPI AGNanomaterials2079-49912020-12-011116710.3390/nano11010067Laser Thermochemical High-Contrast Recording on Thin Metal FilmsElena A. Shakhno0Quang D. Nguyen1Dmitry A. Sinev2Elizaveta V. Matvienko3Roman A. Zakoldaev4Vadim P. Veiko5Faculty of Laser Photonics and Optoelectronics, ITMO University, 197101 Saint Petersburg, RussiaFaculty of Laser Photonics and Optoelectronics, ITMO University, 197101 Saint Petersburg, RussiaFaculty of Laser Photonics and Optoelectronics, ITMO University, 197101 Saint Petersburg, RussiaFaculty of Laser Photonics and Optoelectronics, ITMO University, 197101 Saint Petersburg, RussiaFaculty of Laser Photonics and Optoelectronics, ITMO University, 197101 Saint Petersburg, RussiaFaculty of Laser Photonics and Optoelectronics, ITMO University, 197101 Saint Petersburg, RussiaLaser-induced thermochemical recording of nano- and microsized structures on thin films has attracted intense interest over the last few decades due to essential applications in the photonics industry. Nevertheless, the relationship between the laser parameters and the properties of the formed oxide structures, both geometrical and optical, is still implicit. In this work, direct laser interference patterning of the titanium (Ti) film in the oxidative regime was applied to form submicron periodical structures. Depending on the number of laser pulses, the regime of high contrast structures recording was observed with the maximum achievable thickness of the oxide layer. The investigation revealed high transmittance of the formed oxide layers, i.e., the contrast of recorded structures reached up to 90% in the visible range. To analyze the experimental results obtained, a theoretical model was developed based on calculations of the oxide formation dynamics. The model operates on Wagner oxidation law and the corresponding optical properties of the oxide–metal–glass substrate system changing nonlinearly after each pulse. A good agreement of the experimental results with the modeling estimations allowed us to extend the model application to other metals, specifically to those with optically transparent oxides, such as zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), and tantalum (Ta). The performed analysis highlighted the importance of choosing the correct laser parameters due to the complexity and nonlinearity of optical, thermal, and chemical processes in the metal film during its laser-induced oxidation in the air. The developed model allowed selecting the suitable temporal–energetic regimes and predicting the optical characteristics of the structures formed with an accuracy of 10%. The results are promising in terms of their implementation in the photonics industry for the production of optical converters.https://www.mdpi.com/2079-4991/11/1/67picosecond laser pulsesdirect interference patterningDOEthin metal filmWagner oxidation lawoptical contrast
spellingShingle Elena A. Shakhno
Quang D. Nguyen
Dmitry A. Sinev
Elizaveta V. Matvienko
Roman A. Zakoldaev
Vadim P. Veiko
Laser Thermochemical High-Contrast Recording on Thin Metal Films
Nanomaterials
picosecond laser pulses
direct interference patterning
DOE
thin metal film
Wagner oxidation law
optical contrast
title Laser Thermochemical High-Contrast Recording on Thin Metal Films
title_full Laser Thermochemical High-Contrast Recording on Thin Metal Films
title_fullStr Laser Thermochemical High-Contrast Recording on Thin Metal Films
title_full_unstemmed Laser Thermochemical High-Contrast Recording on Thin Metal Films
title_short Laser Thermochemical High-Contrast Recording on Thin Metal Films
title_sort laser thermochemical high contrast recording on thin metal films
topic picosecond laser pulses
direct interference patterning
DOE
thin metal film
Wagner oxidation law
optical contrast
url https://www.mdpi.com/2079-4991/11/1/67
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AT dmitryasinev laserthermochemicalhighcontrastrecordingonthinmetalfilms
AT elizavetavmatvienko laserthermochemicalhighcontrastrecordingonthinmetalfilms
AT romanazakoldaev laserthermochemicalhighcontrastrecordingonthinmetalfilms
AT vadimpveiko laserthermochemicalhighcontrastrecordingonthinmetalfilms