Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry
A method to characterize cross-linking differences in polymers such as waveguide polymers has been developed. The method is based on the scan-free information acquisition utilizing a low-coherence interferometer in conjunction with an imaging spectrometer. By the introduction of a novel analyzing al...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2019-03-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/19/5/1152 |
| _version_ | 1811305383410532352 |
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| author | Christopher Taudt Bryan Nelsen Elisabeth Rossegger Sandra Schlögl Edmund Koch Peter Hartmann |
| author_facet | Christopher Taudt Bryan Nelsen Elisabeth Rossegger Sandra Schlögl Edmund Koch Peter Hartmann |
| author_sort | Christopher Taudt |
| collection | DOAJ |
| description | A method to characterize cross-linking differences in polymers such as waveguide polymers has been developed. The method is based on the scan-free information acquisition utilizing a low-coherence interferometer in conjunction with an imaging spectrometer. By the introduction of a novel analyzing algorithm, the recorded spectral-phase data was interpreted as wavelength-dependent optical thickness which is matchable with the refractive index and therefore with the degree of cross-linking. In the course of this work, the method was described in its hardware and algorithmic implementation as well as in its accuracy. Comparative measurements and error estimations showed an accuracy in the range of 10−6 in terms of the refractive index. Finally, photo-lithographically produced samples with laterally defined cross-linking differences have been characterized. It could be shown, that differences in the optical thickness of ±1.5 μm are distinguishable. |
| first_indexed | 2024-04-13T08:25:32Z |
| format | Article |
| id | doaj.art-408c078851f7497aaec9e3357eea4aaa |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-13T08:25:32Z |
| publishDate | 2019-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-408c078851f7497aaec9e3357eea4aaa2022-12-22T02:54:30ZengMDPI AGSensors1424-82202019-03-01195115210.3390/s19051152s19051152Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence InterferometryChristopher Taudt0Bryan Nelsen1Elisabeth Rossegger2Sandra Schlögl3Edmund Koch4Peter Hartmann5Faculty of Physical Engineering/Computer Sciences, University of Applied Sciences Zwickau, D-08056 Zwickau, GermanyFaculty of Physical Engineering/Computer Sciences, University of Applied Sciences Zwickau, D-08056 Zwickau, GermanyPolymer Competence Center Leoben, AT-8700 Leoben, AustriaPolymer Competence Center Leoben, AT-8700 Leoben, AustriaFaculty of Electrical and Computer Engineering, Technical University Dresden, D-01307 Dresden, GermanyFaculty of Physical Engineering/Computer Sciences, University of Applied Sciences Zwickau, D-08056 Zwickau, GermanyA method to characterize cross-linking differences in polymers such as waveguide polymers has been developed. The method is based on the scan-free information acquisition utilizing a low-coherence interferometer in conjunction with an imaging spectrometer. By the introduction of a novel analyzing algorithm, the recorded spectral-phase data was interpreted as wavelength-dependent optical thickness which is matchable with the refractive index and therefore with the degree of cross-linking. In the course of this work, the method was described in its hardware and algorithmic implementation as well as in its accuracy. Comparative measurements and error estimations showed an accuracy in the range of 10−6 in terms of the refractive index. Finally, photo-lithographically produced samples with laterally defined cross-linking differences have been characterized. It could be shown, that differences in the optical thickness of ±1.5 μm are distinguishable.http://www.mdpi.com/1424-8220/19/5/1152interferometrycross-linking characterizationwhite-light interferometrydispersion-enhanced low-coherence interferometryphotoresistsemiconductor manufacturing |
| spellingShingle | Christopher Taudt Bryan Nelsen Elisabeth Rossegger Sandra Schlögl Edmund Koch Peter Hartmann Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry Sensors interferometry cross-linking characterization white-light interferometry dispersion-enhanced low-coherence interferometry photoresist semiconductor manufacturing |
| title | Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry |
| title_full | Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry |
| title_fullStr | Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry |
| title_full_unstemmed | Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry |
| title_short | Spatially Resolved Cross-Linking Characterization by Imaging Low-Coherence Interferometry |
| title_sort | spatially resolved cross linking characterization by imaging low coherence interferometry |
| topic | interferometry cross-linking characterization white-light interferometry dispersion-enhanced low-coherence interferometry photoresist semiconductor manufacturing |
| url | http://www.mdpi.com/1424-8220/19/5/1152 |
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