Experimental Formation and Mechanism Study for Super-High Dielectric Constant AlO<sub>x</sub>/TiO<sub>y</sub> Nanolaminates

Experimental Formation and Mechanism Study for Super-High Dielectric Constant AlO<sub>x</sub>/TiO<sub>y</sub> Nanolaminates

Super-high dielectric constant (<i>k</i>) AlO<sub>x</sub>/TiO<sub>y</sub> nanolaminates (ATO NLs) are deposited by an atomic layer deposition technique for application in next-generation electronics. Individual multilayers with uniform thicknesses are formed for t...

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Bibliographic Details
Main Authors:	Jiangwei Liu, Masayuki Okamura, Hisanori Mashiko, Masataka Imura, Meiyong Liao, Ryosuke Kikuchi, Michio Suzuka, Yasuo Koide
Format:	Article
Language:	English
Published:	MDPI AG 2023-04-01
Series:	Nanomaterials
Subjects:	super-high dielectric constant nanolaminate ATO atomic layer deposition capacitor double-Schottky contacts
Online Access:	https://www.mdpi.com/2079-4991/13/7/1256

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