Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators
With the recent progress in downsizing and the sophistication of various industrial products, the need for more compact actuators is increasing. Actuators account for the larger percentage of volume and weight of a product compared with other parts and devices. We have proposed fabrication process o...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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The Japan Society of Mechanical Engineers
2008-04-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/2/2/2_2_238/_pdf/-char/en |
| _version_ | 1811225675231657984 |
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| author | Masaru SETOMOTO Yoshifumi MATSUMOTO Shuhei YAMASHITA Daiji NODA Tadashi HATTORI |
| author_facet | Masaru SETOMOTO Yoshifumi MATSUMOTO Shuhei YAMASHITA Daiji NODA Tadashi HATTORI |
| author_sort | Masaru SETOMOTO |
| collection | DOAJ |
| description | With the recent progress in downsizing and the sophistication of various industrial products, the need for more compact actuators is increasing. Actuators account for the larger percentage of volume and weight of a product compared with other parts and devices. We have proposed fabrication process of spiral micro coils that employs X-ray lithography. This process will be effective for fabricating coils of a high aspect ratio lines. Reducing the size of coil lines and increasing their aspect ratio are expected to reduce the size and increase the output of actuators. Using this process, we formed spiral coil lines that can be used in electromagnetic actuators. X-ray lithography was used to form a high aspect ratio helical structure on the surface of an acrylic resin pipe. As a measure to suppress void generation, which is one of the shortcomings of electroplating processes, the sputtering apparatus and plating equipment were improved, a pretreatment process was additionally provided, and the actual electroplating method was improved. As a result, a void-free metallic deposit could be formed on a thin coil line. At the final step of this research study, we etched the coil line to determine optimal etching conditions. |
| first_indexed | 2024-04-12T09:11:22Z |
| format | Article |
| id | doaj.art-408da22b32914bf8bf9f103db2ce674b |
| institution | Directory Open Access Journal |
| issn | 1881-3054 |
| language | English |
| last_indexed | 2024-04-12T09:11:22Z |
| publishDate | 2008-04-01 |
| publisher | The Japan Society of Mechanical Engineers |
| record_format | Article |
| series | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| spelling | doaj.art-408da22b32914bf8bf9f103db2ce674b2022-12-22T03:38:57ZengThe Japan Society of Mechanical EngineersJournal of Advanced Mechanical Design, Systems, and Manufacturing1881-30542008-04-012223824510.1299/jamdsm.2.238jamdsmFabrication of Spiral Micro Coil Lines for Electromagnetic ActuatorsMasaru SETOMOTO0Yoshifumi MATSUMOTO1Shuhei YAMASHITA2Daiji NODA3Tadashi HATTORI4Laboratory of Advanced Science & Technology for Industry, University of HyogoLaboratory of Advanced Science & Technology for Industry, University of HyogoLaboratory of Advanced Science & Technology for Industry, University of HyogoLaboratory of Advanced Science & Technology for Industry, University of HyogoLaboratory of Advanced Science & Technology for Industry, University of HyogoWith the recent progress in downsizing and the sophistication of various industrial products, the need for more compact actuators is increasing. Actuators account for the larger percentage of volume and weight of a product compared with other parts and devices. We have proposed fabrication process of spiral micro coils that employs X-ray lithography. This process will be effective for fabricating coils of a high aspect ratio lines. Reducing the size of coil lines and increasing their aspect ratio are expected to reduce the size and increase the output of actuators. Using this process, we formed spiral coil lines that can be used in electromagnetic actuators. X-ray lithography was used to form a high aspect ratio helical structure on the surface of an acrylic resin pipe. As a measure to suppress void generation, which is one of the shortcomings of electroplating processes, the sputtering apparatus and plating equipment were improved, a pretreatment process was additionally provided, and the actual electroplating method was improved. As a result, a void-free metallic deposit could be formed on a thin coil line. At the final step of this research study, we etched the coil line to determine optimal etching conditions.https://www.jstage.jst.go.jp/article/jamdsm/2/2/2_2_238/_pdf/-char/enligax-ray lithographymicrocoilelectroplatingactuator |
| spellingShingle | Masaru SETOMOTO Yoshifumi MATSUMOTO Shuhei YAMASHITA Daiji NODA Tadashi HATTORI Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators Journal of Advanced Mechanical Design, Systems, and Manufacturing liga x-ray lithography microcoil electroplating actuator |
| title | Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators |
| title_full | Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators |
| title_fullStr | Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators |
| title_full_unstemmed | Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators |
| title_short | Fabrication of Spiral Micro Coil Lines for Electromagnetic Actuators |
| title_sort | fabrication of spiral micro coil lines for electromagnetic actuators |
| topic | liga x-ray lithography microcoil electroplating actuator |
| url | https://www.jstage.jst.go.jp/article/jamdsm/2/2/2_2_238/_pdf/-char/en |
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