Studying the Properties of RF-Sputtered Nanocrystalline Tin-Doped Indium Oxide

Studying the Properties of RF-Sputtered Nanocrystalline Tin-Doped Indium Oxide

The ceramic target of Indium tinoxide (ITO) (90% In2O3-10%SnO2) has been used to prepare transparent semiconductive thin films on glass substrate by RF magnetron sputtering at room temperature. The properties of the thin films are affected by controlling the deposition parameters, namely, RF power v...

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Bibliographic Details
Main Authors:	Abd El-Hady B. Kashyout, Marwa Fathy, Moataz B. Soliman
Format:	Article
Language:	English
Published:	Wiley 2011-01-01
Series:	International Journal of Photoenergy
Online Access:	http://dx.doi.org/10.1155/2011/139374

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