Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment Applications
In this work, a MEMS piezoresistive micro pressure sensor (1.5 × 1.5 × 0.82 mm) is designed and fabricated with SOI-based micromachining technology and assembled using anodic bonding technology. In order to optimize the linearity and sensitivity over a wide effective pressure range (0–5 MPa) and tem...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-09-01
|
| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/11/19/9012 |
| _version_ | 1797516845249462272 |
|---|---|
| author | Mengru Jiao Minghao Wang Ye Fan Bangbang Guo Bowen Ji Yuhua Cheng Gaofeng Wang |
| author_facet | Mengru Jiao Minghao Wang Ye Fan Bangbang Guo Bowen Ji Yuhua Cheng Gaofeng Wang |
| author_sort | Mengru Jiao |
| collection | DOAJ |
| description | In this work, a MEMS piezoresistive micro pressure sensor (1.5 × 1.5 × 0.82 mm) is designed and fabricated with SOI-based micromachining technology and assembled using anodic bonding technology. In order to optimize the linearity and sensitivity over a wide effective pressure range (0–5 MPa) and temperature range (25–125 °C), the diaphragm thickness and the insulation of piezoresistors are precisely controlled by an optimized micromachining process. The consistency of the four piezoresistors is greatly improved by optimizing the structure of the ohmic contact pads. Furthermore, the probability of piezoresistive breakdown during anodic bonding is greatly reduced by conducting the top and bottom silicon of the SOI. At room temperature, the pressure sensor with 40 µm diaphragm demonstrates reliable linearity (0.48% F.S.) and sensitivity (33.04 mV/MPa) over a wide pressure range of 0–5.0 MPa. In addition, a polyimide protection layer is fabricated on the top surface of the sensor to prevent it from corrosion by a moist marine environment. To overcome the linearity drift due to temperature variation in practice, a digital temperature compensation system is developed for the pressure sensor, which shows a maximum error of 0.43% F.S. in a temperature range of 25–125 °C. |
| first_indexed | 2024-03-10T07:06:33Z |
| format | Article |
| id | doaj.art-414123c8db4e4c06b71b99695d816118 |
| institution | Directory Open Access Journal |
| issn | 2076-3417 |
| language | English |
| last_indexed | 2024-03-10T07:06:33Z |
| publishDate | 2021-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Applied Sciences |
| spelling | doaj.art-414123c8db4e4c06b71b99695d8161182023-11-22T15:46:26ZengMDPI AGApplied Sciences2076-34172021-09-011119901210.3390/app11199012Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment ApplicationsMengru Jiao0Minghao Wang1Ye Fan2Bangbang Guo3Bowen Ji4Yuhua Cheng5Gaofeng Wang6MOE Engineering Research Center of Smart Microsensors and Microsystems, School of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310018, ChinaMOE Engineering Research Center of Smart Microsensors and Microsystems, School of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310018, ChinaMOE Engineering Research Center of Smart Microsensors and Microsystems, School of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310018, ChinaMOE Engineering Research Center of Smart Microsensors and Microsystems, School of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310018, ChinaThe Unmanned System Research Institute, Northwestern Polytechnical University, Xi’an 710060, ChinaMOE Engineering Research Center of Smart Microsensors and Microsystems, School of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310018, ChinaMOE Engineering Research Center of Smart Microsensors and Microsystems, School of Electronics & Information, Hangzhou Dianzi University, Hangzhou 310018, ChinaIn this work, a MEMS piezoresistive micro pressure sensor (1.5 × 1.5 × 0.82 mm) is designed and fabricated with SOI-based micromachining technology and assembled using anodic bonding technology. In order to optimize the linearity and sensitivity over a wide effective pressure range (0–5 MPa) and temperature range (25–125 °C), the diaphragm thickness and the insulation of piezoresistors are precisely controlled by an optimized micromachining process. The consistency of the four piezoresistors is greatly improved by optimizing the structure of the ohmic contact pads. Furthermore, the probability of piezoresistive breakdown during anodic bonding is greatly reduced by conducting the top and bottom silicon of the SOI. At room temperature, the pressure sensor with 40 µm diaphragm demonstrates reliable linearity (0.48% F.S.) and sensitivity (33.04 mV/MPa) over a wide pressure range of 0–5.0 MPa. In addition, a polyimide protection layer is fabricated on the top surface of the sensor to prevent it from corrosion by a moist marine environment. To overcome the linearity drift due to temperature variation in practice, a digital temperature compensation system is developed for the pressure sensor, which shows a maximum error of 0.43% F.S. in a temperature range of 25–125 °C.https://www.mdpi.com/2076-3417/11/19/9012temperature compensationwide-rangepressure sensorpolyimide anticorrosive coatingharsh environment |
| spellingShingle | Mengru Jiao Minghao Wang Ye Fan Bangbang Guo Bowen Ji Yuhua Cheng Gaofeng Wang Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment Applications Applied Sciences temperature compensation wide-range pressure sensor polyimide anticorrosive coating harsh environment |
| title | Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment Applications |
| title_full | Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment Applications |
| title_fullStr | Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment Applications |
| title_full_unstemmed | Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment Applications |
| title_short | Temperature Compensated Wide-Range Micro Pressure Sensor with Polyimide Anticorrosive Coating for Harsh Environment Applications |
| title_sort | temperature compensated wide range micro pressure sensor with polyimide anticorrosive coating for harsh environment applications |
| topic | temperature compensation wide-range pressure sensor polyimide anticorrosive coating harsh environment |
| url | https://www.mdpi.com/2076-3417/11/19/9012 |
| work_keys_str_mv | AT mengrujiao temperaturecompensatedwiderangemicropressuresensorwithpolyimideanticorrosivecoatingforharshenvironmentapplications AT minghaowang temperaturecompensatedwiderangemicropressuresensorwithpolyimideanticorrosivecoatingforharshenvironmentapplications AT yefan temperaturecompensatedwiderangemicropressuresensorwithpolyimideanticorrosivecoatingforharshenvironmentapplications AT bangbangguo temperaturecompensatedwiderangemicropressuresensorwithpolyimideanticorrosivecoatingforharshenvironmentapplications AT bowenji temperaturecompensatedwiderangemicropressuresensorwithpolyimideanticorrosivecoatingforharshenvironmentapplications AT yuhuacheng temperaturecompensatedwiderangemicropressuresensorwithpolyimideanticorrosivecoatingforharshenvironmentapplications AT gaofengwang temperaturecompensatedwiderangemicropressuresensorwithpolyimideanticorrosivecoatingforharshenvironmentapplications |