Nanoscale multi-beam lithography of photonic crystals with ultrafast laser
Abstract Photonic crystals are utilized in many noteworthy applications like optical communications, light flow control, and quantum optics. Photonic crystal with nanoscale structure is important for the manipulation of light propagation in visible and near-infrared range. Herein, we propose a novel...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2023-07-01
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| Series: | Light: Science & Applications |
| Online Access: | https://doi.org/10.1038/s41377-023-01178-3 |