Tilted Wave Fizeau Interferometer for flexible and robust asphere and freeform testing
Tilted Wave Interferometry (TWI) is a measurement technique for fast and flexible interferometric testing of aspheres and freeform surfaces. The first version of the tilted wave principle was implemented in a Twyman-Green type setup with separate reference arm, which is intrinsically susceptible to...
Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
Light Publishing Group
2022-08-01
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Series: | Light: Advanced Manufacturing |
Subjects: | |
Online Access: | https://www.light-am.com/article/doi/10.37188/lam.2022.048 |