Tilted Wave Fizeau Interferometer for flexible and robust asphere and freeform testing

Tilted Wave Fizeau Interferometer for flexible and robust asphere and freeform testing

Tilted Wave Interferometry (TWI) is a measurement technique for fast and flexible interferometric testing of aspheres and freeform surfaces. The first version of the tilted wave principle was implemented in a Twyman-Green type setup with separate reference arm, which is intrinsically susceptible to...

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Bibliographic Details
Main Authors: Christian Schober, Rolf Beisswanger, Antonia Gronle, Christof Pruss, Wolfgang Osten
Format: Article
Language:English
Published: Light Publishing Group 2022-08-01
Series:Light: Advanced Manufacturing
Subjects:
freeform measurement
asphere measurement
common-path interferometry
tilted wave interferometer
fizeau interferometer
Online Access:https://www.light-am.com/article/doi/10.37188/lam.2022.048

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