Tungsten-Based Cost-Effective Gas Sensors for H<sub>2</sub>S Detection

Tungsten-Based Cost-Effective Gas Sensors for H<sub>2</sub>S Detection

Tungsten trioxide thin films were deposited on silicon substrates by non-reactive RF sputtering from a WO<sub>3</sub> target at room temperature. The WO<sub>3</sub> films were post-annealed at two different temperatures, 400 °C and 500 °C. The morphological and microstructura...

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Bibliographic Details
Main Authors:	Didier Fasquelle, Nathalie Verbrugghe, Stéphanie Députier
Format:	Article
Language:	English
Published:	MDPI AG 2021-10-01
Series:	Chemosensors
Subjects:	WO<sub>3</sub> thin film gas sensor RF sputtering hydrogen sulfide
Online Access:	https://www.mdpi.com/2227-9040/9/11/295

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