Scanning Probe Lithography: State-of-the-Art and Future Perspectives
High-throughput and high-accuracy nanofabrication methods are required for the ever-increasing demand for nanoelectronics, high-density data storage devices, nanophotonics, quantum computing, molecular circuitry, and scaffolds in bioengineering used for cell proliferation applications. The scanning...
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-01-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/2/228 |
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| author | Pengfei Fan Jian Gao Hui Mao Yanquan Geng Yongda Yan Yuzhang Wang Saurav Goel Xichun Luo |
| author_facet | Pengfei Fan Jian Gao Hui Mao Yanquan Geng Yongda Yan Yuzhang Wang Saurav Goel Xichun Luo |
| author_sort | Pengfei Fan |
| collection | DOAJ |
| description | High-throughput and high-accuracy nanofabrication methods are required for the ever-increasing demand for nanoelectronics, high-density data storage devices, nanophotonics, quantum computing, molecular circuitry, and scaffolds in bioengineering used for cell proliferation applications. The scanning probe lithography (SPL) nanofabrication technique is a critical nanofabrication method with great potential to evolve into a disruptive atomic-scale fabrication technology to meet these demands. Through this timely review, we aspire to provide an overview of the SPL fabrication mechanism and the state-the-art research in this area, and detail the applications and characteristics of this technique, including the effects of thermal aspects and chemical aspects, and the influence of electric and magnetic fields in governing the mechanics of the functionalized tip interacting with the substrate during SPL. Alongside this, the review also sheds light on comparing various fabrication capabilities, throughput, and attainable resolution. Finally, the paper alludes to the fact that a majority of the reported literature suggests that SPL has yet to achieve its full commercial potential and is currently largely a laboratory-based nanofabrication technique used for prototyping of nanostructures and nanodevices. |
| first_indexed | 2024-03-09T21:25:31Z |
| format | Article |
| id | doaj.art-4341b7538cc246f49bec8409b24f3640 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T21:25:31Z |
| publishDate | 2022-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-4341b7538cc246f49bec8409b24f36402023-11-23T21:10:37ZengMDPI AGMicromachines2072-666X2022-01-0113222810.3390/mi13020228Scanning Probe Lithography: State-of-the-Art and Future PerspectivesPengfei Fan0Jian Gao1Hui Mao2Yanquan Geng3Yongda Yan4Yuzhang Wang5Saurav Goel6Xichun Luo7Centre for Precision Manufacturing, Department of DMEM, University of Strathclyde, Glasgow G1 1XQ, UKCentre for Precision Manufacturing, Department of DMEM, University of Strathclyde, Glasgow G1 1XQ, UKKey Laboratory of Biomass Chemical Engineering of Ministry of Education, College of Chemical and Biological Engineering, Zhejiang University, Hangzhou 310027, ChinaCenter for Precision Engineering, Harbin Institute of Technology, Harbin 150001, ChinaCenter for Precision Engineering, Harbin Institute of Technology, Harbin 150001, ChinaCenter for Precision Engineering, Harbin Institute of Technology, Harbin 150001, ChinaSchool of Engineering, London South Bank University, 103 Borough Road, London SE1 0AA, UKCentre for Precision Manufacturing, Department of DMEM, University of Strathclyde, Glasgow G1 1XQ, UKHigh-throughput and high-accuracy nanofabrication methods are required for the ever-increasing demand for nanoelectronics, high-density data storage devices, nanophotonics, quantum computing, molecular circuitry, and scaffolds in bioengineering used for cell proliferation applications. The scanning probe lithography (SPL) nanofabrication technique is a critical nanofabrication method with great potential to evolve into a disruptive atomic-scale fabrication technology to meet these demands. Through this timely review, we aspire to provide an overview of the SPL fabrication mechanism and the state-the-art research in this area, and detail the applications and characteristics of this technique, including the effects of thermal aspects and chemical aspects, and the influence of electric and magnetic fields in governing the mechanics of the functionalized tip interacting with the substrate during SPL. Alongside this, the review also sheds light on comparing various fabrication capabilities, throughput, and attainable resolution. Finally, the paper alludes to the fact that a majority of the reported literature suggests that SPL has yet to achieve its full commercial potential and is currently largely a laboratory-based nanofabrication technique used for prototyping of nanostructures and nanodevices.https://www.mdpi.com/2072-666X/13/2/228nanofabricationscanning probe lithography (SPL)scanning probe microscopy (SPM)nanostructures |
| spellingShingle | Pengfei Fan Jian Gao Hui Mao Yanquan Geng Yongda Yan Yuzhang Wang Saurav Goel Xichun Luo Scanning Probe Lithography: State-of-the-Art and Future Perspectives Micromachines nanofabrication scanning probe lithography (SPL) scanning probe microscopy (SPM) nanostructures |
| title | Scanning Probe Lithography: State-of-the-Art and Future Perspectives |
| title_full | Scanning Probe Lithography: State-of-the-Art and Future Perspectives |
| title_fullStr | Scanning Probe Lithography: State-of-the-Art and Future Perspectives |
| title_full_unstemmed | Scanning Probe Lithography: State-of-the-Art and Future Perspectives |
| title_short | Scanning Probe Lithography: State-of-the-Art and Future Perspectives |
| title_sort | scanning probe lithography state of the art and future perspectives |
| topic | nanofabrication scanning probe lithography (SPL) scanning probe microscopy (SPM) nanostructures |
| url | https://www.mdpi.com/2072-666X/13/2/228 |
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