Reciprocating Arc Silicon Strain Gauges
Currently, silicon-strain-gauge-based diaphragm pressure sensors use four single-gauge chips for high-output sensitivity. However, the four-single-gauge configuration increases the number of glass frit bonds and the number of aluminum wire bonds, reducing the long-term stability, reliability, and yi...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-01-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/3/1381 |
| _version_ | 1797623179945967616 |
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| author | Ji-Hoon Han Sung Joon Min Joon Hyub Kim Nam Ki Min |
| author_facet | Ji-Hoon Han Sung Joon Min Joon Hyub Kim Nam Ki Min |
| author_sort | Ji-Hoon Han |
| collection | DOAJ |
| description | Currently, silicon-strain-gauge-based diaphragm pressure sensors use four single-gauge chips for high-output sensitivity. However, the four-single-gauge configuration increases the number of glass frit bonds and the number of aluminum wire bonds, reducing the long-term stability, reliability, and yield of the diaphragm pressure sensor. In this study, a new design of general-purpose silicon strain gauges was developed to improve the sensor output voltage while reducing the number of bonds. The new gauges consist grid patterns with a reciprocating arc of silicon piezoresistors on a thin glass backing. The gauges make handling easier in the bonding process due to the use of thin glass for the gauge backing. The pressure sensors were tested under pressure ranging from 0 to 50 bar at five different temperatures, with a linear output with a typical sensitivity of approximately 16 mV/V/bar and an offset shift of –6 mV to 2 mV. The new approach also opens the possibility to extend arc strain gauges to half-bridge and full-bridge configurations to further reduce the number of glass frit and Al wire bonds in the diaphragm pressure sensor. |
| first_indexed | 2024-03-11T09:25:05Z |
| format | Article |
| id | doaj.art-43846bd6c13645369a0fc18d056d6342 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-11T09:25:05Z |
| publishDate | 2023-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-43846bd6c13645369a0fc18d056d63422023-11-16T18:00:15ZengMDPI AGSensors1424-82202023-01-01233138110.3390/s23031381Reciprocating Arc Silicon Strain GaugesJi-Hoon Han0Sung Joon Min1Joon Hyub Kim2Nam Ki Min3KIURI Center for Hydrogen Based Next Generation Mechanical System, Inha University, Incheon 21999, Republic of KoreaDepartment of Stretchable Task Team, LG Display, Seoul 07796, Republic of KoreaDepartment of Nanomechatronics Engineering, Pusan National University, Busan 46241, Republic of KoreaDepartment of Electro-Mechanical Systems Engineering, Korea University, Sejong 30019, Republic of KoreaCurrently, silicon-strain-gauge-based diaphragm pressure sensors use four single-gauge chips for high-output sensitivity. However, the four-single-gauge configuration increases the number of glass frit bonds and the number of aluminum wire bonds, reducing the long-term stability, reliability, and yield of the diaphragm pressure sensor. In this study, a new design of general-purpose silicon strain gauges was developed to improve the sensor output voltage while reducing the number of bonds. The new gauges consist grid patterns with a reciprocating arc of silicon piezoresistors on a thin glass backing. The gauges make handling easier in the bonding process due to the use of thin glass for the gauge backing. The pressure sensors were tested under pressure ranging from 0 to 50 bar at five different temperatures, with a linear output with a typical sensitivity of approximately 16 mV/V/bar and an offset shift of –6 mV to 2 mV. The new approach also opens the possibility to extend arc strain gauges to half-bridge and full-bridge configurations to further reduce the number of glass frit and Al wire bonds in the diaphragm pressure sensor.https://www.mdpi.com/1424-8220/23/3/1381reciprocating arc strain gaugebulk micromachiningglass frit bondingpressure sensorsteel diaphragm |
| spellingShingle | Ji-Hoon Han Sung Joon Min Joon Hyub Kim Nam Ki Min Reciprocating Arc Silicon Strain Gauges Sensors reciprocating arc strain gauge bulk micromachining glass frit bonding pressure sensor steel diaphragm |
| title | Reciprocating Arc Silicon Strain Gauges |
| title_full | Reciprocating Arc Silicon Strain Gauges |
| title_fullStr | Reciprocating Arc Silicon Strain Gauges |
| title_full_unstemmed | Reciprocating Arc Silicon Strain Gauges |
| title_short | Reciprocating Arc Silicon Strain Gauges |
| title_sort | reciprocating arc silicon strain gauges |
| topic | reciprocating arc strain gauge bulk micromachining glass frit bonding pressure sensor steel diaphragm |
| url | https://www.mdpi.com/1424-8220/23/3/1381 |
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