| Summary: | As electrolyte materials for proton conductive fuel cells, perovskite-type materials such as barium cerates and barium zirconates have received a lot of attention due to their high protonic conduction at intermediate temperatures. Yet, the crystalline structure and the microstructure of the electrolyte layers are of the utmost importance that define the resulting protonic conductivity. The aim of this research was to investigate the formation of doped/undoped BCO and BZO thin films using e-beam vapor deposition and to analyze the influence of the formation parameters on the microstructural and crystallographic properties. Crystalline structure and microstructure were investigated by X-ray diffractometer and scanning electron microscope, while the elemental composition of the resulting thin films was analyzed by an energy-dispersive X-ray spectroscope. It was found that the formed thin films were highly dense and consisted of the oriented columnar grains. The crystallinity of the thin films was strongly expressed with the predominant crystallographic orientations for undoped/doped barium cerates. Yttrium dopant had an influence on the lattice parameters and crystallite sizes. With the chosen technological parameters allowed to both, barium cerates and barium zirconates did not form carbonates and did not experience the degradation process.
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