Investigation of non linear dynamics of an excitable magnetron sputtering plasma
In this paper nonlinear dynamical behaviour of an excitable DC magnetron sputtering plasma has been investigated. Initially, plasma exhibited fixed point dynamics whereas with the increase in the discharge voltage, spikes were observed in the floating potential fluctuations. Furthermore, the increas...
| 主要な著者: | , , , , |
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| フォーマット: | 論文 |
| 言語: | English |
| 出版事項: |
Elsevier
2019-03-01
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| シリーズ: | Results in Physics |
| オンライン･アクセス: | http://www.sciencedirect.com/science/article/pii/S2211379718335216 |