Investigation of non linear dynamics of an excitable magnetron sputtering plasma
In this paper nonlinear dynamical behaviour of an excitable DC magnetron sputtering plasma has been investigated. Initially, plasma exhibited fixed point dynamics whereas with the increase in the discharge voltage, spikes were observed in the floating potential fluctuations. Furthermore, the increas...
| Main Authors: | , , , , |
|---|---|
| פורמט: | Article |
| שפה: | English |
| יצא לאור: |
Elsevier
2019-03-01
|
| סדרה: | Results in Physics |
| גישה מקוונת: | http://www.sciencedirect.com/science/article/pii/S2211379718335216 |