Pulsed-N2 assisted growth of 5-20 nm thick β-W films

Pulsed-N2 assisted growth of 5-20 nm thick β-W films

A technique to deposit 5-20 nm thick β-phase W using a 2-second periodic pulse of 1 sccm-N2 gas on Si(001) and SiN(5 nm)/Si(001) substrates is reported. Resistivity, X-ray photoelectron spectroscopy and X-ray reflectivity were utilized to determine phase, bonding and thickness, respectively. X-ray d...

Full description

Bibliographic Details
Main Authors:	Avyaya J. Narasimham, Avery Green, Richard J. Matyi, Prasanna Khare, Tuan Vo, Alain Diebold, Vincent P. LaBella
Format:	Article
Language:	English
Published:	AIP Publishing LLC 2015-11-01
Series:	AIP Advances
Online Access:	http://dx.doi.org/10.1063/1.4935372

Similar Items

Fabrication of 5-20 nm thick β-W films
by: Avyaya J. Narasimham, et al.
Published: (2014-11-01)

Rapid optical determination of topological insulator nanoplate thickness and oxidation
by: Fan Yang, et al.
Published: (2017-01-01)

Cavity optomechanics with nm-thick membranes
by: Pearson, AN
Published: (2020)

Two-dimensional Fourier transform spectroscopy in the ultraviolet with sub-20 fs pump pulses and 250–720 nm supercontinuum probe
by: N Krebs, et al.
Published: (2013-01-01)

Pulsed Photothermal Radiometric Depth Profiling of Bruises by 532 nm and 1064 nm Lasers
by: Ana Marin, et al.
Published: (2023-02-01)

Effect of 1064 nm and 532 nm pulsed laser ablation in liquid on gold nanoparticles size /
by: Nur Hanis Amira Ahmad Nazri , 1996-, author, et al.
Published: (2019)

2‐nm‐Thick Indium Oxide Featuring High Mobility
by: Chung Kim Nguyen, et al.
Published: (2023-03-01)

Detection of ferromagnetic resonance from 1 nm-thick Co
by: Shugo Yoshii, et al.
Published: (2020-09-01)

Optical Constants and Band Gap Evolution with Phase Transition in Sub-20-nm-Thick TiO2 Films Prepared by ALD
by: Yue-Jie Shi, et al.
Published: (2017-03-01)

Megawatt peak power Mamyshev oscillator seeded by sub-nanosecond pulses either at 1064 nm or 1033 nm
by: Gotti Riccardo, et al.
Published: (2024-01-01)

Wavelength-Tunable Chirped Pulse Amplification System (1720 nm–1800 nm) Based on Thulium-Doped Fiber
by: Xinyang Liu, et al.
Published: (2024-05-01)

Heavy-ion-induced digital single event transients in a 180 nm fully depleted SOI process
by: Gouker, Pascale M., et al.
Published: (2010)

BOXCARS-geometry 2DES setup in the 300-340nm range with pulse-to-pulse phase correction at 50kHz
by: Roland Thomas, et al.
Published: (2019-01-01)

Subgap spectroscopy along hybrid nanowires by nm-thick tunnel barriers
by: Vukan Levajac, et al.
Published: (2023-10-01)

Finite size effects: deuterium diffusion in nm thick vanadium layers
by: Wen Huang, et al.
Published: (2017-01-01)

Coating of upconversion nanoparticles with silica nanoshells of 5–250 nm thickness
by: Cynthia Kembuan, et al.
Published: (2019-12-01)

Single hollow-core fiber for the guidance of IR (1030 nm) and visible (515 nm) ultrashort pulsed laser radiations
by: Chena Bowen, et al.
Published: (2024-01-01)

Comparison of short-pulse subthreshold (532 nm) and infrared micropulse (810 nm) macular laser for diabetic macular edema
by: Abdulrahman Al-Barki, et al.
Published: (2021-01-01)

Pulse shape tuning for 1064 nm nanosecond MOPA fibre laser
by: Liu, Meng, et al.
Published: (2018)

High-Efficiency Ho:YAP Pulse Laser Pumped at 1989 nm
by: Chao Niu, et al.
Published: (2021-05-01)

Pulse broadening and compression at 515 nm in a multi-pass cell
by: Hariton Victor, et al.
Published: (2022-01-01)

Anodized 20 nm diameter nanotubular titanium for improved bladder stent applications
by: Ece Alpaslan, et al.
Published: (2011-01-01)

Sub-20 nm multilayer nanopillar patterning for hybrid SET/CMOS integration
by: M.-L. Pourteau, et al.
Published: (2020-11-01)

The Application of Color Doppler Ultrasound in the Evaluation of the Efficacy of 595-nm Pulsed Dye Laser Combined with 755-nm Long-Pulse Alexandrite Laser in the Treatment of Hybrid Infantile Hemangiomas
by: Lu Y, et al.
Published: (2022-12-01)

Sequelae After Involution of Superficial Infantile Hemangioma: Early Intervention with 595-nm Pulsed Laser Combined with 755-nm Long-Pulsed Alexandrite Laser versus Wait-and-See
by: Jiang JC, et al.
Published: (2021-01-01)

Effects of 20–100 nm particles on liquid clouds in the clean summertime Arctic
by: W. R. Leaitch, et al.
Published: (2016-09-01)

Three-dimensional adaptive optical nanoscopy for thick specimen imaging at sub-50-nm resolution
by: Hao, X, et al.
Published: (2021)

19 nm‐Thick Grafted‐To Polymer Brushes onto Optimized Poly(Dopamine)‐Coated Surfaces
by: Lucas W. Teunissen, et al.
Published: (2023-06-01)

Electromagnetic Analysis of Vertical Resistive Memory with a Sub-nm Thick Electrode
by: Batyrbek Alimkhanuly, et al.
Published: (2020-08-01)

Evidence for incoherent reversal in perpendicular MRAM cells down to 20 nm diameter
by: H. J. Richter, et al.
Published: (2023-02-01)

Ultrashort Isolated Attosecond Pulse Generation with 750-nm Free-Carrier Envelope Phase Near-Infrared Pulses
by: Xiaowei Wang, et al.
Published: (2024-01-01)

Optical properties of synthesized Au/Ag Nanoparticles using 532 nm and 1064 nm pulsed laser ablation: effect of solution concentration
by: Shaghayegh AdibAmini, et al.
Published: (2023-03-01)

Pulsed exposure mode of the 445 nm semiconductor laser in phonosurgery: an experimental study
by: M. A. Ryabova, et al.
Published: (2023-08-01)

Efficient Water-Assisted Glass Cutting with 355 nm Picosecond Laser Pulses
by: Edgaras Markauskas, et al.
Published: (2022-05-01)

Advanced Scheme to Generate MHz, Fully Coherent FEL Pulses at nm Wavelength
by: Georgia Paraskaki, et al.
Published: (2021-06-01)

Angiokeratoma of Fordyce treated with long pulsed Nd:YAG 1064 nm laser
by: Clarissa Prieto Herman Reinehr, et al.
Published: (2020-12-01)

Compact Nd:YAP/V:YAG nanosecond pulse generator at 1342nm
by: Kadlec Kryštof, et al.
Published: (2022-01-01)

Pulsed Single-Frequency Polarization-Maintaining Holmium Laser at 2050 & 2090 nm
by: Lorenz D., et al.
Published: (2020-01-01)

High‐Density Vertical Transistors with Pitch Size Down to 20 nm
by: Zhaojing Xiao, et al.
Published: (2023-10-01)

In Situ Reconnection of Nanoelectrodes Over 20 nm Gaps on Polyimide Substrate
by: Xubin Zhang, et al.
Published: (2024-02-01)