High thermal conductivity and ultrahigh thermal boundary conductance of homoepitaxial AlN thin films
Wurtzite aluminum nitride (AlN) has attracted increasing attention for high-power and high-temperature operations due to its high piezoelectricity, ultrawide-bandgap, and large thermal conductivity k. The k of epitaxially grown AlN on foreign substrates has been investigated; however, no thermal stu...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2022-01-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/5.0078155 |