Energy control of neutral oxygen particles passing through an aperture electrode
The kinetic energy of neutralized oxygen particles passing through an aperture electrode was measured by a quadrupole mass spectrometer. The peak energy position was controlled by changing the plasma source power, acceleration bias power, and gas pressure in the vacuum chamber. Keywords: Beam energy...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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Elsevier
2018-03-01
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| Series: | Results in Physics |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2211379717322179 |
| _version_ | 1811324544163512320 |
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| author | Takeo Ohno Daiki Nakayama Takeru Okada Seiji Samukawa |
| author_facet | Takeo Ohno Daiki Nakayama Takeru Okada Seiji Samukawa |
| author_sort | Takeo Ohno |
| collection | DOAJ |
| description | The kinetic energy of neutralized oxygen particles passing through an aperture electrode was measured by a quadrupole mass spectrometer. The peak energy position was controlled by changing the plasma source power, acceleration bias power, and gas pressure in the vacuum chamber. Keywords: Beam energy, Neutralized plasma particle, Oxygen plasma |
| first_indexed | 2024-04-13T14:16:15Z |
| format | Article |
| id | doaj.art-4514fcbb1b4e409ba87ed67c883badde |
| institution | Directory Open Access Journal |
| issn | 2211-3797 |
| language | English |
| last_indexed | 2024-04-13T14:16:15Z |
| publishDate | 2018-03-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Results in Physics |
| spelling | doaj.art-4514fcbb1b4e409ba87ed67c883badde2022-12-22T02:43:38ZengElsevierResults in Physics2211-37972018-03-018169171Energy control of neutral oxygen particles passing through an aperture electrodeTakeo Ohno0Daiki Nakayama1Takeru Okada2Seiji Samukawa3WPI – Advanced Institute for Materials Research (WPI-AIMR), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan; Japan Science and Technology Agency (JST), PRESTO, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan; Corresponding author at: WPI – Advanced Institute for Materials Research (WPI-AIMR), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan.Institute of Fluid Science (IFS), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, JapanInstitute of Fluid Science (IFS), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, JapanWPI – Advanced Institute for Materials Research (WPI-AIMR), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan; Institute of Fluid Science (IFS), Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, JapanThe kinetic energy of neutralized oxygen particles passing through an aperture electrode was measured by a quadrupole mass spectrometer. The peak energy position was controlled by changing the plasma source power, acceleration bias power, and gas pressure in the vacuum chamber. Keywords: Beam energy, Neutralized plasma particle, Oxygen plasmahttp://www.sciencedirect.com/science/article/pii/S2211379717322179 |
| spellingShingle | Takeo Ohno Daiki Nakayama Takeru Okada Seiji Samukawa Energy control of neutral oxygen particles passing through an aperture electrode Results in Physics |
| title | Energy control of neutral oxygen particles passing through an aperture electrode |
| title_full | Energy control of neutral oxygen particles passing through an aperture electrode |
| title_fullStr | Energy control of neutral oxygen particles passing through an aperture electrode |
| title_full_unstemmed | Energy control of neutral oxygen particles passing through an aperture electrode |
| title_short | Energy control of neutral oxygen particles passing through an aperture electrode |
| title_sort | energy control of neutral oxygen particles passing through an aperture electrode |
| url | http://www.sciencedirect.com/science/article/pii/S2211379717322179 |
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