Efficiency Improvement of Industrial Silicon Solar Cells by the POCl<sub>3</sub> Diffusion Process

To improve the efficiency of polycrystalline silicon solar cells, process optimization is a key technology in the photovoltaic industry. Despite the efficiency of this technique to be reproducible, economic, and simple, it presents a major inconvenience to have a heavily doped region near the surfac...

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Main Authors: Xiaodong Xu, Wangping Wu, Qinqin Wang
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Materials
Subjects:
Online Access:https://www.mdpi.com/1996-1944/16/5/1824
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author Xiaodong Xu
Wangping Wu
Qinqin Wang
author_facet Xiaodong Xu
Wangping Wu
Qinqin Wang
author_sort Xiaodong Xu
collection DOAJ
description To improve the efficiency of polycrystalline silicon solar cells, process optimization is a key technology in the photovoltaic industry. Despite the efficiency of this technique to be reproducible, economic, and simple, it presents a major inconvenience to have a heavily doped region near the surface which induces a high minority carrier recombination. To limit this effect, an optimization of diffused phosphorous profiles is required. A “low-high-low” temperature step of the POCl<sub>3</sub> diffusion process was developed to improve the efficiency of industrial-type polycrystalline silicon solar cells. The low surface concentration of phosphorus doping of 4.54 × 10<sup>20</sup> atoms/cm<sup>3</sup> and junction depth of 0.31 μm at a dopant concentration of <i>N</i> = 10<sup>17</sup> atoms/cm<sup>3</sup> were obtained. The open-circuit voltage and fill factor of solar cells increased up to 1 mV and 0.30%, compared with the online low-temperature diffusion process, respectively. The efficiency of solar cells and the power of PV cells were increased by 0.1% and 1 W, respectively. This POCl<sub>3</sub> diffusion process effectively improved the overall efficiency of industrial-type polycrystalline silicon solar cells in this solar field.
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spelling doaj.art-4559cc3d87fa4ece956ceba6f6348fec2023-11-17T08:03:24ZengMDPI AGMaterials1996-19442023-02-01165182410.3390/ma16051824Efficiency Improvement of Industrial Silicon Solar Cells by the POCl<sub>3</sub> Diffusion ProcessXiaodong Xu0Wangping Wu1Qinqin Wang2Electrochemistry and Corrosion Laboratory, School of Mechanical Engineering, Changzhou University, Changzhou 213164, ChinaElectrochemistry and Corrosion Laboratory, School of Mechanical Engineering, Changzhou University, Changzhou 213164, ChinaSchool of Mechanical Engineering, Yangzhou University, Yangzhou 225127, ChinaTo improve the efficiency of polycrystalline silicon solar cells, process optimization is a key technology in the photovoltaic industry. Despite the efficiency of this technique to be reproducible, economic, and simple, it presents a major inconvenience to have a heavily doped region near the surface which induces a high minority carrier recombination. To limit this effect, an optimization of diffused phosphorous profiles is required. A “low-high-low” temperature step of the POCl<sub>3</sub> diffusion process was developed to improve the efficiency of industrial-type polycrystalline silicon solar cells. The low surface concentration of phosphorus doping of 4.54 × 10<sup>20</sup> atoms/cm<sup>3</sup> and junction depth of 0.31 μm at a dopant concentration of <i>N</i> = 10<sup>17</sup> atoms/cm<sup>3</sup> were obtained. The open-circuit voltage and fill factor of solar cells increased up to 1 mV and 0.30%, compared with the online low-temperature diffusion process, respectively. The efficiency of solar cells and the power of PV cells were increased by 0.1% and 1 W, respectively. This POCl<sub>3</sub> diffusion process effectively improved the overall efficiency of industrial-type polycrystalline silicon solar cells in this solar field.https://www.mdpi.com/1996-1944/16/5/1824polycrystalline siliconsolar cellslow-high-lowphosphorus diffusion
spellingShingle Xiaodong Xu
Wangping Wu
Qinqin Wang
Efficiency Improvement of Industrial Silicon Solar Cells by the POCl<sub>3</sub> Diffusion Process
Materials
polycrystalline silicon
solar cells
low-high-low
phosphorus diffusion
title Efficiency Improvement of Industrial Silicon Solar Cells by the POCl<sub>3</sub> Diffusion Process
title_full Efficiency Improvement of Industrial Silicon Solar Cells by the POCl<sub>3</sub> Diffusion Process
title_fullStr Efficiency Improvement of Industrial Silicon Solar Cells by the POCl<sub>3</sub> Diffusion Process
title_full_unstemmed Efficiency Improvement of Industrial Silicon Solar Cells by the POCl<sub>3</sub> Diffusion Process
title_short Efficiency Improvement of Industrial Silicon Solar Cells by the POCl<sub>3</sub> Diffusion Process
title_sort efficiency improvement of industrial silicon solar cells by the pocl sub 3 sub diffusion process
topic polycrystalline silicon
solar cells
low-high-low
phosphorus diffusion
url https://www.mdpi.com/1996-1944/16/5/1824
work_keys_str_mv AT xiaodongxu efficiencyimprovementofindustrialsiliconsolarcellsbythepoclsub3subdiffusionprocess
AT wangpingwu efficiencyimprovementofindustrialsiliconsolarcellsbythepoclsub3subdiffusionprocess
AT qinqinwang efficiencyimprovementofindustrialsiliconsolarcellsbythepoclsub3subdiffusionprocess