Size-effects in time-dependent mechanics in metallic MEMS
Reliability of microelectromechanical systems (MEMS) depends a.o. on time-dependent deformation such as creep and fatigue [1]. It is known from literature that this behavior is affected by size-effects: the interaction between microstructural length scales and dimensional length scales [2,3]. Not mu...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2010-06-01
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| Series: | EPJ Web of Conferences |
| Online Access: | http://dx.doi.org/10.1051/epjconf/20100606003 |