Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators
Acoustic detection based on optical technology has moved in the direction of high sensitivity and resolution. In this study, an optical waveguide acoustic sensor based on a ring resonator with the evanescent field is proposed. Grooves are introduced into the ring resonators as a direct sensitive str...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-02-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/3/512 |
| _version_ | 1797610055639498752 |
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| author | Yuan Han Yongqiu Zheng Nan Li Yifan Luo Chenyang Xue Jiandong Bai Jiamin Chen |
| author_facet | Yuan Han Yongqiu Zheng Nan Li Yifan Luo Chenyang Xue Jiandong Bai Jiamin Chen |
| author_sort | Yuan Han |
| collection | DOAJ |
| description | Acoustic detection based on optical technology has moved in the direction of high sensitivity and resolution. In this study, an optical waveguide acoustic sensor based on a ring resonator with the evanescent field is proposed. Grooves are introduced into the ring resonators as a direct sensitive structure to excite the evanescent field. A series of resonators with diverse grooves are fabricated for a comparative analysis of acoustic performance. The acoustic parameters of bandwidth, sensitivity, and signal-to-noise ratio (SNR) vary with different grooves indicated by the Q-factor. The results show that the ring resonators with variable-sized grooves exhibit excellent capability of acoustics detection. A maximum frequency of 160 kHz and a high sensitivity of 60.075 mV/Pa is achieved, with the minimum detectable sound pressure being 131.34 µPa/Hz<sup>1/2</sup>. Furthermore, the resonators with high Q-factors represent a remarkable sound resolution reaching 0.2 Hz. This work is of great significance for optimizing acoustic sensors and broadening the application range. |
| first_indexed | 2024-03-11T06:10:05Z |
| format | Article |
| id | doaj.art-458c05239e2d45d9b4f115811684c52f |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-11T06:10:05Z |
| publishDate | 2023-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-458c05239e2d45d9b4f115811684c52f2023-11-17T12:41:51ZengMDPI AGMicromachines2072-666X2023-02-0114351210.3390/mi14030512Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring ResonatorsYuan Han0Yongqiu Zheng1Nan Li2Yifan Luo3Chenyang Xue4Jiandong Bai5Jiamin Chen6Key Laboratory of Instrumentation Science and Dynamic Measurement Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science and Dynamic Measurement Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science and Dynamic Measurement Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science and Dynamic Measurement Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science and Dynamic Measurement Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science and Dynamic Measurement Ministry of Education, North University of China, Taiyuan 030051, ChinaKey Laboratory of Instrumentation Science and Dynamic Measurement Ministry of Education, North University of China, Taiyuan 030051, ChinaAcoustic detection based on optical technology has moved in the direction of high sensitivity and resolution. In this study, an optical waveguide acoustic sensor based on a ring resonator with the evanescent field is proposed. Grooves are introduced into the ring resonators as a direct sensitive structure to excite the evanescent field. A series of resonators with diverse grooves are fabricated for a comparative analysis of acoustic performance. The acoustic parameters of bandwidth, sensitivity, and signal-to-noise ratio (SNR) vary with different grooves indicated by the Q-factor. The results show that the ring resonators with variable-sized grooves exhibit excellent capability of acoustics detection. A maximum frequency of 160 kHz and a high sensitivity of 60.075 mV/Pa is achieved, with the minimum detectable sound pressure being 131.34 µPa/Hz<sup>1/2</sup>. Furthermore, the resonators with high Q-factors represent a remarkable sound resolution reaching 0.2 Hz. This work is of great significance for optimizing acoustic sensors and broadening the application range.https://www.mdpi.com/2072-666X/14/3/512acoustic sensorring resonatoroptical acoustic detection systemfrequency bandwidthhigh sensitivity |
| spellingShingle | Yuan Han Yongqiu Zheng Nan Li Yifan Luo Chenyang Xue Jiandong Bai Jiamin Chen Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators Micromachines acoustic sensor ring resonator optical acoustic detection system frequency bandwidth high sensitivity |
| title | Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators |
| title_full | Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators |
| title_fullStr | Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators |
| title_full_unstemmed | Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators |
| title_short | Acoustic Sensing Performance Investigation Based on Grooves Etched in the Ring Resonators |
| title_sort | acoustic sensing performance investigation based on grooves etched in the ring resonators |
| topic | acoustic sensor ring resonator optical acoustic detection system frequency bandwidth high sensitivity |
| url | https://www.mdpi.com/2072-666X/14/3/512 |
| work_keys_str_mv | AT yuanhan acousticsensingperformanceinvestigationbasedongroovesetchedintheringresonators AT yongqiuzheng acousticsensingperformanceinvestigationbasedongroovesetchedintheringresonators AT nanli acousticsensingperformanceinvestigationbasedongroovesetchedintheringresonators AT yifanluo acousticsensingperformanceinvestigationbasedongroovesetchedintheringresonators AT chenyangxue acousticsensingperformanceinvestigationbasedongroovesetchedintheringresonators AT jiandongbai acousticsensingperformanceinvestigationbasedongroovesetchedintheringresonators AT jiaminchen acousticsensingperformanceinvestigationbasedongroovesetchedintheringresonators |