Development of a New Surface Acoustic Wave Based Gyroscope on a X-112°Y LiTaO3 Substrate
A new micro gyroscope based on the surface acoustic wave (SAW) gyroscopic effect was developed. The SAW gyroscopic effect is investigated by applying the surface effective permittivity method in the regime of small ratios of the rotation velocity and the frequency of the SAW. The theoretical analysi...
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| Format: | Article |
| Language: | English |
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MDPI AG
2011-11-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/11/11/10894/ |
| _version_ | 1811187882721804288 |
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| author | Shitang He Minghua Liu Xiao Xie Jiuling Liu Wen Wang |
| author_facet | Shitang He Minghua Liu Xiao Xie Jiuling Liu Wen Wang |
| author_sort | Shitang He |
| collection | DOAJ |
| description | A new micro gyroscope based on the surface acoustic wave (SAW) gyroscopic effect was developed. The SAW gyroscopic effect is investigated by applying the surface effective permittivity method in the regime of small ratios of the rotation velocity and the frequency of the SAW. The theoretical analysis indicates that the larger velocity shift was observed from the rotated X-112°Y LiTaO3 substrate. Then, two SAW delay lines with reverse direction and an operation frequency of 160 MHz are fabricated on a same X-112°Y LiTaO3 chip as the feedback of two SAW oscillators, which act as the sensor element. The single-phase unidirectional transducer (SPUDT) and combed transducers were used to structure the delay lines to improve the frequency stability of the oscillator. The rotation of a piezoelectric medium gives rise to a shift of the propagation velocity of SAW due to the Coriolis force, resulting in the frequency shift of the SAW device, and hence, the evaluation of the sensor performance. Meanwhile, the differential structure was performed to double the sensitivity and compensate for the temperature effects. Using a precise rate table, the performance of the fabricated SAW gyroscope was evaluated experimentally. A sensitivity of 1.332 Hz deg−1 s at angular rates of up to 1,000 deg s−1 and good linearity are observed. |
| first_indexed | 2024-04-11T14:11:07Z |
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| id | doaj.art-45a89bc8a1984eb893d50a6d42a346eb |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T14:11:07Z |
| publishDate | 2011-11-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-45a89bc8a1984eb893d50a6d42a346eb2022-12-22T04:19:42ZengMDPI AGSensors1424-82202011-11-011111108941090610.3390/s111110894Development of a New Surface Acoustic Wave Based Gyroscope on a X-112°Y LiTaO3 SubstrateShitang HeMinghua LiuXiao XieJiuling LiuWen WangA new micro gyroscope based on the surface acoustic wave (SAW) gyroscopic effect was developed. The SAW gyroscopic effect is investigated by applying the surface effective permittivity method in the regime of small ratios of the rotation velocity and the frequency of the SAW. The theoretical analysis indicates that the larger velocity shift was observed from the rotated X-112°Y LiTaO3 substrate. Then, two SAW delay lines with reverse direction and an operation frequency of 160 MHz are fabricated on a same X-112°Y LiTaO3 chip as the feedback of two SAW oscillators, which act as the sensor element. The single-phase unidirectional transducer (SPUDT) and combed transducers were used to structure the delay lines to improve the frequency stability of the oscillator. The rotation of a piezoelectric medium gives rise to a shift of the propagation velocity of SAW due to the Coriolis force, resulting in the frequency shift of the SAW device, and hence, the evaluation of the sensor performance. Meanwhile, the differential structure was performed to double the sensitivity and compensate for the temperature effects. Using a precise rate table, the performance of the fabricated SAW gyroscope was evaluated experimentally. A sensitivity of 1.332 Hz deg−1 s at angular rates of up to 1,000 deg s−1 and good linearity are observed.http://www.mdpi.com/1424-8220/11/11/10894/Coriolis forcegyroscopic effectSAW gyroscopesurface effective permittivity |
| spellingShingle | Shitang He Minghua Liu Xiao Xie Jiuling Liu Wen Wang Development of a New Surface Acoustic Wave Based Gyroscope on a X-112°Y LiTaO3 Substrate Sensors Coriolis force gyroscopic effect SAW gyroscope surface effective permittivity |
| title | Development of a New Surface Acoustic Wave Based Gyroscope on a X-112°Y LiTaO3 Substrate |
| title_full | Development of a New Surface Acoustic Wave Based Gyroscope on a X-112°Y LiTaO3 Substrate |
| title_fullStr | Development of a New Surface Acoustic Wave Based Gyroscope on a X-112°Y LiTaO3 Substrate |
| title_full_unstemmed | Development of a New Surface Acoustic Wave Based Gyroscope on a X-112°Y LiTaO3 Substrate |
| title_short | Development of a New Surface Acoustic Wave Based Gyroscope on a X-112°Y LiTaO3 Substrate |
| title_sort | development of a new surface acoustic wave based gyroscope on a x 112°y litao3 substrate |
| topic | Coriolis force gyroscopic effect SAW gyroscope surface effective permittivity |
| url | http://www.mdpi.com/1424-8220/11/11/10894/ |
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