High-performance flexible BiCMOS electronics based on single-crystal Si nanomembrane
Electronics: Microfabrication enables integrated silicon-based thin-film transistors Semiconductor-based thin-film electronics is an emerging field in modern electronics due to the advance in mechanical flexibility, yet the fabrication that is currently relied on the conventional technologies for ri...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2017-09-01
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| Series: | npj Flexible Electronics |
| Online Access: | https://doi.org/10.1038/s41528-017-0001-1 |
| _version_ | 1819042234920599552 |
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| author | Jung-Hun Seo Kan Zhang Munho Kim Weidong Zhou Zhenqiang Ma |
| author_facet | Jung-Hun Seo Kan Zhang Munho Kim Weidong Zhou Zhenqiang Ma |
| author_sort | Jung-Hun Seo |
| collection | DOAJ |
| description | Electronics: Microfabrication enables integrated silicon-based thin-film transistors Semiconductor-based thin-film electronics is an emerging field in modern electronics due to the advance in mechanical flexibility, yet the fabrication that is currently relied on the conventional technologies for rigid devices constrain the integration of functional devices on one chip. A team lead by Zhenqiang Ma at University of Wisconsin-Madison developed a single batch processing technique, which allowed them to print multiple transistors on a single piece of plastic substrate. The key step is to selectively dope single crystalline silicon nanomembranes using spatially controllable ion implantation. As a demonstration, integrated bipolar-complementary metal-oxide-semiconductor thin-film transistors with performance comparable to their rigid counterparts are built. The fabrication reported might prove to be an enabling technology for processing a broad range of flexible electronics with potential industrial adaptability. |
| first_indexed | 2024-12-21T09:37:39Z |
| format | Article |
| id | doaj.art-45b69454335f49f3909a0dc1df4356a4 |
| institution | Directory Open Access Journal |
| issn | 2397-4621 |
| language | English |
| last_indexed | 2024-12-21T09:37:39Z |
| publishDate | 2017-09-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | npj Flexible Electronics |
| spelling | doaj.art-45b69454335f49f3909a0dc1df4356a42022-12-21T19:08:34ZengNature Portfolionpj Flexible Electronics2397-46212017-09-01111710.1038/s41528-017-0001-1High-performance flexible BiCMOS electronics based on single-crystal Si nanomembraneJung-Hun Seo0Kan Zhang1Munho Kim2Weidong Zhou3Zhenqiang Ma4Department of Electrical and Computer Engineering, University of Wisconsin-MadisonDepartment of Electrical and Computer Engineering, University of Wisconsin-MadisonDepartment of Electrical and Computer Engineering, University of Wisconsin-MadisonDepartment of Electrical Engineering, University of Texas at ArlingtonDepartment of Electrical and Computer Engineering, University of Wisconsin-MadisonElectronics: Microfabrication enables integrated silicon-based thin-film transistors Semiconductor-based thin-film electronics is an emerging field in modern electronics due to the advance in mechanical flexibility, yet the fabrication that is currently relied on the conventional technologies for rigid devices constrain the integration of functional devices on one chip. A team lead by Zhenqiang Ma at University of Wisconsin-Madison developed a single batch processing technique, which allowed them to print multiple transistors on a single piece of plastic substrate. The key step is to selectively dope single crystalline silicon nanomembranes using spatially controllable ion implantation. As a demonstration, integrated bipolar-complementary metal-oxide-semiconductor thin-film transistors with performance comparable to their rigid counterparts are built. The fabrication reported might prove to be an enabling technology for processing a broad range of flexible electronics with potential industrial adaptability.https://doi.org/10.1038/s41528-017-0001-1 |
| spellingShingle | Jung-Hun Seo Kan Zhang Munho Kim Weidong Zhou Zhenqiang Ma High-performance flexible BiCMOS electronics based on single-crystal Si nanomembrane npj Flexible Electronics |
| title | High-performance flexible BiCMOS electronics based on single-crystal Si nanomembrane |
| title_full | High-performance flexible BiCMOS electronics based on single-crystal Si nanomembrane |
| title_fullStr | High-performance flexible BiCMOS electronics based on single-crystal Si nanomembrane |
| title_full_unstemmed | High-performance flexible BiCMOS electronics based on single-crystal Si nanomembrane |
| title_short | High-performance flexible BiCMOS electronics based on single-crystal Si nanomembrane |
| title_sort | high performance flexible bicmos electronics based on single crystal si nanomembrane |
| url | https://doi.org/10.1038/s41528-017-0001-1 |
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