High-performance flexible BiCMOS electronics based on single-crystal Si nanomembrane
Electronics: Microfabrication enables integrated silicon-based thin-film transistors Semiconductor-based thin-film electronics is an emerging field in modern electronics due to the advance in mechanical flexibility, yet the fabrication that is currently relied on the conventional technologies for ri...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2017-09-01
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| Series: | npj Flexible Electronics |
| Online Access: | https://doi.org/10.1038/s41528-017-0001-1 |