Aluminum Nitride Out-of-Plane Piezoelectric MEMS Actuators
Integrating microelectromechanical systems (MEMS) actuators with low-loss suspended silicon nitride waveguides enables the precise alignment of these waveguides to other photonic integrated circuits (PICs). This requires both in-plane and out-of-plane actuators to ensure high-precision optical align...
Main Authors: | Almur A. S. Rabih, Mohammad Kazemi, Michaël Ménard, Frederic Nabki |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-03-01
|
Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/14/3/700 |
Similar Items
-
In‐Plane AlN‐based Actuator: Toward a New Generation of Piezoelectric MEMS
by: Kristina Bespalova, et al.
Published: (2023-08-01) -
Analytical Modeling and Simulation of S-Drive Piezoelectric Actuators
by: Nicholas A. Jones, et al.
Published: (2021-04-01) -
Wide Two-Degree-of-Freedom Static Laser Scanner with Miniaturized Transmission Mechanism and Piezoelectric Actuation
by: Takashi Ozaki, et al.
Published: (2021-09-01) -
The Staircase Drive—A Novel Actuator Design Optimised for Daisy-Chaining and Minimum Stress Load Coupling
by: Falk-Martin Hoffmann, et al.
Published: (2021-11-01) -
Piezoelectric actuators : Vector Control Method /
by: Giraud, Frédéric, et al.
Published: (2019)