| Summary: | The present study depicts the first-ever optimized surface acoustic wave (SAW) device based on Beryllium Oxide (BeO) thin film. The feasibility of surface acoustic wave devices based on BeO/128° YX LiNbO<sub>3</sub> layered structure has been examined theoretically. The SAW phase velocity, electromechanical coupling coefficient, and temperature coefficient of delay for BeO/128° YX LiNbO<sub>3</sub> layered structure are calculated. The layered structure is found to exhibit optimum value of phase velocity (4476 ms<sup>−1</sup>) and coupling coefficient (~9.66%) at BeO over layer thickness of 0.08 λ. The BeO (0.08 λ)/128° YX LiNbO<sub>3</sub> SAW device is made temperature stable, by integrating it with negative temperature coefficient of delay (TCD) TeO<sub>3</sub> over layer of thickness 0.026λ.
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