Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System
Our latest advances in the field of miniaturized optical PM sensors are presented. This sensor combines a hybrid fluidic-optronic CMOS (holed retina) that is able to record a specific irradiance pattern scattered by an illuminated particle (scattering signature), while enabling the circulation of pa...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-05-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/21/9/3181 |
| _version_ | 1797535352197480448 |
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| author | Gabriel Jobert Pierre Barritault Maryse Fournier Cyrielle Monpeurt Salim Boutami Cécile Jamois Pietro Bernasconi Andrea Lovera Daniele Braga Christian Seassal |
| author_facet | Gabriel Jobert Pierre Barritault Maryse Fournier Cyrielle Monpeurt Salim Boutami Cécile Jamois Pietro Bernasconi Andrea Lovera Daniele Braga Christian Seassal |
| author_sort | Gabriel Jobert |
| collection | DOAJ |
| description | Our latest advances in the field of miniaturized optical PM sensors are presented. This sensor combines a hybrid fluidic-optronic CMOS (holed retina) that is able to record a specific irradiance pattern scattered by an illuminated particle (scattering signature), while enabling the circulation of particles toward the sensing area. The holed retina is optically coupled with a monolithic, millimeter-sized, refracto-reflective optical system. The latter notably performs an optical pre-processing of signatures, with a very wide field of view of scattering angles. This improves the sensitivity of the sensors, and simplifies image processing. We report the precise design methodology for such a sensor, as well as its fabrication and characterization using calibrated polystyrene beads. Finally, we discuss its ability to characterize particles and its potential for further miniaturization and integration. |
| first_indexed | 2024-03-10T11:43:15Z |
| format | Article |
| id | doaj.art-4671d19603e7402ca0906e04f5f5d7d1 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T11:43:15Z |
| publishDate | 2021-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-4671d19603e7402ca0906e04f5f5d7d12023-11-21T18:16:35ZengMDPI AGSensors1424-82202021-05-01219318110.3390/s21093181Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical SystemGabriel Jobert0Pierre Barritault1Maryse Fournier2Cyrielle Monpeurt3Salim Boutami4Cécile Jamois5Pietro Bernasconi6Andrea Lovera7Daniele Braga8Christian Seassal9CEA-LETI Minatec, Université Grenoble-Alpes, F-38000 Grenoble, FranceCEA-LETI Minatec, Université Grenoble-Alpes, F-38000 Grenoble, FranceCEA-LETI Minatec, Université Grenoble-Alpes, F-38000 Grenoble, FranceCEA-LETI Minatec, Université Grenoble-Alpes, F-38000 Grenoble, FranceCEA-LETI Minatec, Université Grenoble-Alpes, F-38000 Grenoble, FranceInstitut des Nanotechnologies de Lyon, UMR CNRS 5270 Ecole Centrale de Lyon, Université de Lyon, F-69134 Ecully, FranceFEMTOprint, CH-6933 Muzzano, SwitzerlandFEMTOprint, CH-6933 Muzzano, SwitzerlandFEMTOprint, CH-6933 Muzzano, SwitzerlandInstitut des Nanotechnologies de Lyon, UMR CNRS 5270 Ecole Centrale de Lyon, Université de Lyon, F-69134 Ecully, FranceOur latest advances in the field of miniaturized optical PM sensors are presented. This sensor combines a hybrid fluidic-optronic CMOS (holed retina) that is able to record a specific irradiance pattern scattered by an illuminated particle (scattering signature), while enabling the circulation of particles toward the sensing area. The holed retina is optically coupled with a monolithic, millimeter-sized, refracto-reflective optical system. The latter notably performs an optical pre-processing of signatures, with a very wide field of view of scattering angles. This improves the sensitivity of the sensors, and simplifies image processing. We report the precise design methodology for such a sensor, as well as its fabrication and characterization using calibrated polystyrene beads. Finally, we discuss its ability to characterize particles and its potential for further miniaturization and integration.https://www.mdpi.com/1424-8220/21/9/3181air qualityparticulate matter sensorlight-scatteringCMOS image sensorminiature opticsmicro-fabrication |
| spellingShingle | Gabriel Jobert Pierre Barritault Maryse Fournier Cyrielle Monpeurt Salim Boutami Cécile Jamois Pietro Bernasconi Andrea Lovera Daniele Braga Christian Seassal Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System Sensors air quality particulate matter sensor light-scattering CMOS image sensor miniature optics micro-fabrication |
| title | Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System |
| title_full | Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System |
| title_fullStr | Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System |
| title_full_unstemmed | Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System |
| title_short | Miniature Optical Particle Counter and Analyzer Involving a Fluidic-Optronic CMOS Chip Coupled with a Millimeter-Sized Glass Optical System |
| title_sort | miniature optical particle counter and analyzer involving a fluidic optronic cmos chip coupled with a millimeter sized glass optical system |
| topic | air quality particulate matter sensor light-scattering CMOS image sensor miniature optics micro-fabrication |
| url | https://www.mdpi.com/1424-8220/21/9/3181 |
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