New Heteroleptic Germanium Precursors for GeO2 Thin Films by Atomic Layer Deposition
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
American Chemical Society
2023-11-01
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| Series: | ACS Omega |
| Online Access: | https://doi.org/10.1021/acsomega.3c05657 |
| _version_ | 1827697615633907712 |
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| author | Heenang Choi Chanwoo Park Sung Kwang Lee Ji Yeon Ryu Seung Uk Son Taeyong Eom Taek-Mo Chung |
| author_facet | Heenang Choi Chanwoo Park Sung Kwang Lee Ji Yeon Ryu Seung Uk Son Taeyong Eom Taek-Mo Chung |
| author_sort | Heenang Choi |
| collection | DOAJ |
| first_indexed | 2024-03-10T13:12:27Z |
| format | Article |
| id | doaj.art-469ef452837841beb5b409704d112ed0 |
| institution | Directory Open Access Journal |
| issn | 2470-1343 |
| language | English |
| last_indexed | 2024-03-10T13:12:27Z |
| publishDate | 2023-11-01 |
| publisher | American Chemical Society |
| record_format | Article |
| series | ACS Omega |
| spelling | doaj.art-469ef452837841beb5b409704d112ed02023-11-21T10:36:37ZengAmerican Chemical SocietyACS Omega2470-13432023-11-01846437594377010.1021/acsomega.3c05657New Heteroleptic Germanium Precursors for GeO2 Thin Films by Atomic Layer DepositionHeenang Choi0Chanwoo Park1Sung Kwang Lee2Ji Yeon Ryu3Seung Uk Son4Taeyong Eom5Taek-Mo Chung6Thin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon, Republic of KoreaThin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon, Republic of KoreaThin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon, Republic of KoreaThin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon, Republic of KoreaDepartment of Chemistry, Sungkyunkwan University (SKKU), Suwon-si, Gyeonggi-do, Republic of KoreaThin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon, Republic of KoreaThin Film Materials Research Center, Korea Research Institute of Chemical Technology (KRICT), Daejeon, Republic of Koreahttps://doi.org/10.1021/acsomega.3c05657 |
| spellingShingle | Heenang Choi Chanwoo Park Sung Kwang Lee Ji Yeon Ryu Seung Uk Son Taeyong Eom Taek-Mo Chung New Heteroleptic Germanium Precursors for GeO2 Thin Films by Atomic Layer Deposition ACS Omega |
| title | New Heteroleptic Germanium Precursors for GeO2 Thin Films by Atomic Layer Deposition |
| title_full | New Heteroleptic Germanium Precursors for GeO2 Thin Films by Atomic Layer Deposition |
| title_fullStr | New Heteroleptic Germanium Precursors for GeO2 Thin Films by Atomic Layer Deposition |
| title_full_unstemmed | New Heteroleptic Germanium Precursors for GeO2 Thin Films by Atomic Layer Deposition |
| title_short | New Heteroleptic Germanium Precursors for GeO2 Thin Films by Atomic Layer Deposition |
| title_sort | new heteroleptic germanium precursors for geo2 thin films by atomic layer deposition |
| url | https://doi.org/10.1021/acsomega.3c05657 |
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