Pull-In Effect of Suspended Microchannel Resonator Sensor Subjected to Electrostatic Actuation

Pull-In Effect of Suspended Microchannel Resonator Sensor Subjected to Electrostatic Actuation

In this article, the pull-in instability and dynamic characteristics of electrostatically actuated suspended microchannel resonators are studied. A theoretical model is presented to describe the pull-in effect of suspended microchannel resonators by considering the electrostatic field and the intern...

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Bibliographic Details
Main Authors:	Han Yan, Wen-Ming Zhang, Hui-Ming Jiang, Kai-Ming Hu
Format:	Article
Language:	English
Published:	MDPI AG 2017-01-01
Series:	Sensors
Subjects:	MEMS suspended microchannel resonators electrostatic actuation internal fluid flow instability dynamics
Online Access:	http://www.mdpi.com/1424-8220/17/1/114

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