Bubble‐pen lithography: Fundamentals and applications
Abstract Developing on‐chip functional devices requires reliable fabrication methods with high resolution for miniaturization, desired components for enhanced performance, and high throughput for fast prototyping and mass production. Recently, laser‐based bubble‐pen lithography (BPL) has been develo...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2022-08-01
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| Series: | Aggregate |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/agt2.189 |