A Magnetic Metal Hard Mask on Silicon Substrate for Direct Patterning Ultra-High-Resolution OLED Displays
With the development of virtual reality/augmented reality (VR/AR) display devices, the conventional fine metal mask is limited by the wet etch process, which no longer meets the demand for high pixels per inch (PPI) displays. We deposited a layer of magnetic metal on the silicon substrate by physica...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-06-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/7/997 |
| _version_ | 1827618784498679808 |
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| author | Lin Chen Xiuxia Wang Yu Wei Chenggang Zhou |
| author_facet | Lin Chen Xiuxia Wang Yu Wei Chenggang Zhou |
| author_sort | Lin Chen |
| collection | DOAJ |
| description | With the development of virtual reality/augmented reality (VR/AR) display devices, the conventional fine metal mask is limited by the wet etch process, which no longer meets the demand for high pixels per inch (PPI) displays. We deposited a layer of magnetic metal on the silicon substrate by physical vapor deposition (PVD), and then developed a 2-inch, 3175 PPI magnetic metal hard mask on silicon substrate (MMS) through deep silicon etching and other micro-nano processing for patterning Organic Light-Emitting Diodes (OLED) displays, which can achieve smaller pixel size and higher PPI. MMS can not only solve the bottleneck problem of the traditional invar alloy shadow mask with low PPI, but also reduce the bending caused by the deformation of the silicon-based mask due to gravity, so that it achieves high PPI and higher uniformity in OLED displays. |
| first_indexed | 2024-03-09T10:15:18Z |
| format | Article |
| id | doaj.art-478bf7b0f7944312bfa4c2afd4b55463 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T10:15:18Z |
| publishDate | 2022-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-478bf7b0f7944312bfa4c2afd4b554632023-12-01T22:27:12ZengMDPI AGMicromachines2072-666X2022-06-0113799710.3390/mi13070997A Magnetic Metal Hard Mask on Silicon Substrate for Direct Patterning Ultra-High-Resolution OLED DisplaysLin Chen0Xiuxia Wang1Yu Wei2Chenggang Zhou3Center for Micro and Nanoscale Research and Fabrication, Hefei National Laboratory for Physical Science at Microscale, University of Science and Technology of China, Hefei 230026, ChinaCenter for Micro and Nanoscale Research and Fabrication, Hefei National Laboratory for Physical Science at Microscale, University of Science and Technology of China, Hefei 230026, ChinaCenter for Micro and Nanoscale Research and Fabrication, Hefei National Laboratory for Physical Science at Microscale, University of Science and Technology of China, Hefei 230026, ChinaCenter for Micro and Nanoscale Research and Fabrication, Hefei National Laboratory for Physical Science at Microscale, University of Science and Technology of China, Hefei 230026, ChinaWith the development of virtual reality/augmented reality (VR/AR) display devices, the conventional fine metal mask is limited by the wet etch process, which no longer meets the demand for high pixels per inch (PPI) displays. We deposited a layer of magnetic metal on the silicon substrate by physical vapor deposition (PVD), and then developed a 2-inch, 3175 PPI magnetic metal hard mask on silicon substrate (MMS) through deep silicon etching and other micro-nano processing for patterning Organic Light-Emitting Diodes (OLED) displays, which can achieve smaller pixel size and higher PPI. MMS can not only solve the bottleneck problem of the traditional invar alloy shadow mask with low PPI, but also reduce the bending caused by the deformation of the silicon-based mask due to gravity, so that it achieves high PPI and higher uniformity in OLED displays.https://www.mdpi.com/2072-666X/13/7/997shadow maskmagnetic metal hard mask on silicon substratehigh PPIhigh uniform patternOLED displays |
| spellingShingle | Lin Chen Xiuxia Wang Yu Wei Chenggang Zhou A Magnetic Metal Hard Mask on Silicon Substrate for Direct Patterning Ultra-High-Resolution OLED Displays Micromachines shadow mask magnetic metal hard mask on silicon substrate high PPI high uniform pattern OLED displays |
| title | A Magnetic Metal Hard Mask on Silicon Substrate for Direct Patterning Ultra-High-Resolution OLED Displays |
| title_full | A Magnetic Metal Hard Mask on Silicon Substrate for Direct Patterning Ultra-High-Resolution OLED Displays |
| title_fullStr | A Magnetic Metal Hard Mask on Silicon Substrate for Direct Patterning Ultra-High-Resolution OLED Displays |
| title_full_unstemmed | A Magnetic Metal Hard Mask on Silicon Substrate for Direct Patterning Ultra-High-Resolution OLED Displays |
| title_short | A Magnetic Metal Hard Mask on Silicon Substrate for Direct Patterning Ultra-High-Resolution OLED Displays |
| title_sort | magnetic metal hard mask on silicon substrate for direct patterning ultra high resolution oled displays |
| topic | shadow mask magnetic metal hard mask on silicon substrate high PPI high uniform pattern OLED displays |
| url | https://www.mdpi.com/2072-666X/13/7/997 |
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