A comprehensive review of FET‐based pH sensors: materials, fabrication technologies, and modeling
Abstract The demand for miniaturized point‐of‐care chemical/biochemical sensors has driven the development of field‐effect transistors (FETs) based pH sensors over the last 50 years. This paper aims to review the fabrication technologies, device structures, sensing film materials, and modeling techn...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley-VCH
2022-10-01
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| Series: | Electrochemical Science Advances |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/elsa.202100147 |