Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing
<p>The increasing popularity of environments equipped with sensors for convenience and with safety features, as in, for example, smart homes, greenhouses, or the interior of modern cars, demands a variety of sensor systems. In this respect, the sensing of ambient gases in the sense of air qual...
| Main Authors: | , , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
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Copernicus Publications
2022-08-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://jsss.copernicus.org/articles/11/225/2022/jsss-11-225-2022.pdf |
| _version_ | 1798040395424202752 |
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| author | G. Stocker C. Consani P. Thakkar C. Fleury A. Tortschanoff K.-F. Ourak G. Pühringer R. Jannesari P. Saeidi E. Aschauer U. Bartl C. Kovatsch T. Grille B. Jakoby |
| author_facet | G. Stocker C. Consani P. Thakkar C. Fleury A. Tortschanoff K.-F. Ourak G. Pühringer R. Jannesari P. Saeidi E. Aschauer U. Bartl C. Kovatsch T. Grille B. Jakoby |
| author_sort | G. Stocker |
| collection | DOAJ |
| description | <p>The increasing popularity of environments equipped with sensors for convenience and with safety features, as in, for example, smart homes, greenhouses, or the interior of modern cars, demands a variety of sensor systems. In this respect, the sensing of ambient gases in the sense of air quality monitoring or leakage detection is one of the prominent applications. However, even though there are many different systems already available, the trend goes towards smaller and rather inconspicuous sensors which are embedded in the environment. We present the fabrication and characterization of integrated waveguides, which constitute an interesting platform for absorption spectroscopy in the mid-infrared (mid-IR) using the evanescent field of guided modes interacting with the analyte, thus leading to the absorption-induced attenuation of the mode. Corresponding simulations, characterizing the efficiency of the desired interaction, predict values for the confinement factor <span class="inline-formula">Γ</span> and the intrinsic damping <span class="inline-formula"><i>D</i></span> for a waveguide geometry, which is then characterized by measurements. Furthermore, we discuss how these waveguides could be part of an integrated, non-dispersive, mid-IR sensor system fully integrated on a single chip. In this context, we present a way to maintain the quality of waveguides throughout the entire workflow needed to integrate a pyroelectric IR detector based on aluminum nitride (AlN).</p> |
| first_indexed | 2024-04-11T22:07:03Z |
| format | Article |
| id | doaj.art-4854b9a30af6460383d6f3291db28543 |
| institution | Directory Open Access Journal |
| issn | 2194-8771 2194-878X |
| language | English |
| last_indexed | 2024-04-11T22:07:03Z |
| publishDate | 2022-08-01 |
| publisher | Copernicus Publications |
| record_format | Article |
| series | Journal of Sensors and Sensor Systems |
| spelling | doaj.art-4854b9a30af6460383d6f3291db285432022-12-22T04:00:40ZengCopernicus PublicationsJournal of Sensors and Sensor Systems2194-87712194-878X2022-08-011122523110.5194/jsss-11-225-2022Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensingG. Stocker0C. Consani1P. Thakkar2C. Fleury3A. Tortschanoff4K.-F. Ourak5G. Pühringer6R. Jannesari7P. Saeidi8E. Aschauer9U. Bartl10C. Kovatsch11T. Grille12B. Jakoby13Department for MEMS and Smart Power Technologies, Infineon Technologies Austria AG, Siemensstraße 2, 9500 Villach, AustriaDepartment for Sensor Systems, Silicon Austria Labs GmbH, Europastraße 12, 9524 Villach, AustriaDepartment for Sensor Systems, Silicon Austria Labs GmbH, Europastraße 12, 9524 Villach, AustriaDepartment for Sensor Systems, Silicon Austria Labs GmbH, Europastraße 12, 9524 Villach, AustriaDepartment for Sensor Systems, Silicon Austria Labs GmbH, Europastraße 12, 9524 Villach, AustriaDepartment for Sensor Systems, Silicon Austria Labs GmbH, Europastraße 12, 9524 Villach, AustriaInstitute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenberger Straße 69, 4040 Linz, AustriaInstitute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenberger Straße 69, 4040 Linz, AustriaInstitute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenberger Straße 69, 4040 Linz, AustriaDepartment for MEMS and Smart Power Technologies, Infineon Technologies Austria AG, Siemensstraße 2, 9500 Villach, AustriaDepartment for MEMS and Smart Power Technologies, Infineon Technologies Austria AG, Siemensstraße 2, 9500 Villach, AustriaDepartment for MEMS and Smart Power Technologies, Infineon Technologies Austria AG, Siemensstraße 2, 9500 Villach, AustriaDepartment for MEMS and Smart Power Technologies, Infineon Technologies Austria AG, Siemensstraße 2, 9500 Villach, AustriaInstitute for Microelectronics and Microsensors, Johannes Kepler University Linz, Altenberger Straße 69, 4040 Linz, Austria<p>The increasing popularity of environments equipped with sensors for convenience and with safety features, as in, for example, smart homes, greenhouses, or the interior of modern cars, demands a variety of sensor systems. In this respect, the sensing of ambient gases in the sense of air quality monitoring or leakage detection is one of the prominent applications. However, even though there are many different systems already available, the trend goes towards smaller and rather inconspicuous sensors which are embedded in the environment. We present the fabrication and characterization of integrated waveguides, which constitute an interesting platform for absorption spectroscopy in the mid-infrared (mid-IR) using the evanescent field of guided modes interacting with the analyte, thus leading to the absorption-induced attenuation of the mode. Corresponding simulations, characterizing the efficiency of the desired interaction, predict values for the confinement factor <span class="inline-formula">Γ</span> and the intrinsic damping <span class="inline-formula"><i>D</i></span> for a waveguide geometry, which is then characterized by measurements. Furthermore, we discuss how these waveguides could be part of an integrated, non-dispersive, mid-IR sensor system fully integrated on a single chip. In this context, we present a way to maintain the quality of waveguides throughout the entire workflow needed to integrate a pyroelectric IR detector based on aluminum nitride (AlN).</p>https://jsss.copernicus.org/articles/11/225/2022/jsss-11-225-2022.pdf |
| spellingShingle | G. Stocker C. Consani P. Thakkar C. Fleury A. Tortschanoff K.-F. Ourak G. Pühringer R. Jannesari P. Saeidi E. Aschauer U. Bartl C. Kovatsch T. Grille B. Jakoby Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing Journal of Sensors and Sensor Systems |
| title | Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing |
| title_full | Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing |
| title_fullStr | Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing |
| title_full_unstemmed | Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing |
| title_short | Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing |
| title_sort | fabrication of integrated polysilicon waveguides for mid infrared absorption sensing |
| url | https://jsss.copernicus.org/articles/11/225/2022/jsss-11-225-2022.pdf |
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