Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing

Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing

<p>The increasing popularity of environments equipped with sensors for convenience and with safety features, as in, for example, smart homes, greenhouses, or the interior of modern cars, demands a variety of sensor systems. In this respect, the sensing of ambient gases in the sense of air qual...

Full description

Bibliographic Details
Main Authors:	G. Stocker, C. Consani, P. Thakkar, C. Fleury, A. Tortschanoff, K.-F. Ourak, G. Pühringer, R. Jannesari, P. Saeidi, E. Aschauer, U. Bartl, C. Kovatsch, T. Grille, B. Jakoby
Format:	Article
Language:	English
Published:	Copernicus Publications 2022-08-01
Series:	Journal of Sensors and Sensor Systems
Online Access:	https://jsss.copernicus.org/articles/11/225/2022/jsss-11-225-2022.pdf

Similar Items

Coupled Strip-Array Waveguides for Integrated Mid-IR Gas Sensing
by: Pooja Thakkar, et al.
Published: (2023-01-01)

Design, Analysis, and Optimization of a Plasmonic Slot Waveguide for Mid-Infrared Gas Sensing
by: Parviz Saeidi, et al.
Published: (2022-05-01)

Designing Mid-Infrared Gold-Based Plasmonic Slot Waveguides for CO<sub>2</sub>-Sensing Applications
by: Parviz Saeidi, et al.
Published: (2021-04-01)

Design of a Slab Tamm Plasmon Resonator Coupled to a Multistrip Array Waveguide for the Mid Infrared
by: Gerald Pühringer, et al.
Published: (2022-04-01)

Design and Analysis of a Slot Photonic Crystal Waveguide for Highly Sensitive Evanescent Field Absorption Sensing in Fluids
by: Reyhaneh Jannesari, et al.
Published: (2020-08-01)

Ultra-Narrow SPP Generation from Ag Grating
by: Gerald Stocker, et al.
Published: (2021-10-01)

Design of a High <i>Q</i>-Factor Label-Free Optical Biosensor Based on a Photonic Crystal Coupled Cavity Waveguide
by: Reyhaneh Jannesari, et al.
Published: (2023-12-01)

Design of a Curved Shape Photonic Crystal Taper for Highly Efficient Mode Coupling
by: Reyhaneh Jannesari, et al.
Published: (2021-01-01)

A CMOS Compatible Pyroelectric Mid-Infrared Detector Based on Aluminium Nitride
by: Christian Ranacher, et al.
Published: (2019-05-01)

Losses in polysilicon waveguides
by: Black, Marcie R. (Marcie Rochelle)
Published: (2005)

Design of a Narrow Band Filter Based on a Photonic Crystal Cavity for CO<sub>2</sub> Sensing Application
by: Reyhaneh Jannesari, et al.
Published: (2023-05-01)

Spectral characterization of selective emission by an aperiodic cavity-enhanced Tamm plasmon-polariton emitter
by: Gerald Pühringer, et al.
Published: (2023-06-01)

Optical Temperature Sensor Based on Polysilicon Waveguides
by: Xinru Xu, et al.
Published: (2022-12-01)

Low loss polysilicon waveguides for silicon photonics
by: Liao, Ling
Published: (2005)

Impact of Different Metals on the Performance of Slab Tamm Plasmon Resonators
by: Gerald Pühringer, et al.
Published: (2020-11-01)

Highly Selective CMOS-Compatible Mid-Infrared Thermal Emitter/Detector Slab Design Using Optical Tamm-States
by: Gerald Pühringer, et al.
Published: (2019-03-01)

Blowing Polysilicon Fuses
by: Lee, W, et al.
Published: (2009)

Polysilicon emitter bipolar transistors/
by: Kapoor, Ashok K., et al.
Published: (1989)

The modern phase of the polysilicon market
by: Arkady V. Naumov, et al.
Published: (2021-12-01)

Characterization of Gas Absorption Modules Based on Flexible Mid-Infrared Hollow Waveguides
by: Kewang Chen, et al.
Published: (2019-04-01)

Highly Efficient Nano-Porous Polysilicon Solar Absorption Films Prepared by Silver-Induced Etching
by: Yeu-Long Jiang, et al.
Published: (2018-09-01)

Subcritical crack growth in polysilicon MEMS
by: Van Arsdell, William W. (William Walker)
Published: (2005)

Pattern dependencies in the plasma etching of polysilicon
by: Dalton, Timothy Joseph
Published: (2005)

Enhanced field emission from polysilicon emitters using porous silicon
by: Pullen, SE, et al.
Published: (1996)

On-Chip Tests for the Characterization of the Mechanical Strength of Polysilicon
by: Tiago Vicentini Ferreira do Valle, et al.
Published: (2022-11-01)

In Situ Plasma‐Grown Silicon‐Oxide for Polysilicon Passivating Contacts
by: Areej Alzahrani, et al.
Published: (2020-11-01)

An Investigation of the Effects of Emitter Pre-Deposition Temperature in Double-Diffued Polysilicon Emitter Bipolar Transistors
by: E.F Chor, et al.
Published: (2017-11-01)

Feature profile evolution during the high density plasma etching of polysilicon
by: Mahorowala, Arpan P. (Arpan Pravin), 1970-
Published: (2010)

Modeling and random search optimization for the polysilicon CVD reactor
by: Bangwen Xi, et al.
Published: (2023-12-01)

Characterization and Modeling of Chemical-Mechanical Polishing for Polysilicon Microstructures
by: Tang, Brian D., et al.
Published: (2003)

Photonic-electronic integration with polysilicon photonics in bulk CMOS
by: Ram, Rajeev J.
Published: (2016)

Screening experiment for a polysilicon gate etch chamber
by: Levis, Kim-Marie, 1976-
Published: (2014)

High-speed polysilicon CMOS photodetector for telecom and datacom
by: Atabaki, Amir H, et al.
Published: (2017)

Characterization and modeling of polysilicon MEMS chemical-mechanical polishing
by: Tang, Brian D. (Brian David), 1980-
Published: (2005)

In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films
by: Yi-Fan Gu, et al.
Published: (2016-10-01)

Micromechanical Characterization of Polysilicon Films through On-Chip Tests
by: Ramin Mirzazadeh, et al.
Published: (2016-07-01)

Graphene-Based Polarization-Independent Mid-Infrared Electro-Absorption Modulator Integrated in a Chalcogenide Glass Waveguide
by: Yong Zhou, et al.
Published: (2021-05-01)

Mid-infrared generation and spectroscopy with a PPLN ridge waveguide
by: Denzer, W, et al.
Published: (2007)

Study on Deposition Conditions in Coupled Polysilicon CVD Furnaces by Simulations
by: Shengtao Zhang, et al.
Published: (2022-08-01)

Modeling of the plasma etching of polysilicon with chloro- and bromo-trifluoromethane discharges
by: Allen, Kenneth Donald
Published: (2005)