Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing
<p>The increasing popularity of environments equipped with sensors for convenience and with safety features, as in, for example, smart homes, greenhouses, or the interior of modern cars, demands a variety of sensor systems. In this respect, the sensing of ambient gases in the sense of air qual...
| Main Authors: | , , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2022-08-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://jsss.copernicus.org/articles/11/225/2022/jsss-11-225-2022.pdf |