Thermionic Electron Beam Current and Accelerating Voltage Controller for Gas Ion Sources

Thermionic emission sources are key components of electron impact gas ion sources used in measuring instruments, such as mass spectrometers, ionization gauges, and apparatus for ionization cross-section measurements. The repeatability of the measurements taken with such instruments depends on the st...

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Main Authors: Jarosław Sikora, Bartosz Kania, Janusz Mroczka
Format: Article
Language:English
Published: MDPI AG 2021-04-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/21/8/2878
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author Jarosław Sikora
Bartosz Kania
Janusz Mroczka
author_facet Jarosław Sikora
Bartosz Kania
Janusz Mroczka
author_sort Jarosław Sikora
collection DOAJ
description Thermionic emission sources are key components of electron impact gas ion sources used in measuring instruments, such as mass spectrometers, ionization gauges, and apparatus for ionization cross-section measurements. The repeatability of the measurements taken with such instruments depends on the stability of the ion current, which is a function, among other things, of the electron beam current and electron accelerating voltage. In this paper, a laboratory thermionic electron beam current and accelerating voltage controller is presented, based on digital algorithm implementation. The average value of the percentage standard deviation of the emission current is 0.021%, and the maximum electron accelerating voltage change versus the emission current is smaller than 0.011% in the full operating range of the emission current. Its application as a trap current or emission current-regulated ion source power supply could be useful in many measuring instruments, such as in microelectromechanical system (MEMS) mass spectrometers as universal gas sensors, where a stable emission current and electron energy are needed.
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spelling doaj.art-490e3bb9f00d430389dc8a363a000f2a2023-11-21T16:16:59ZengMDPI AGSensors1424-82202021-04-01218287810.3390/s21082878Thermionic Electron Beam Current and Accelerating Voltage Controller for Gas Ion SourcesJarosław Sikora0Bartosz Kania1Janusz Mroczka2Department of Automatics and Metrology, Lublin University of Technology, 20-618 Lublin, PolandDepartment of Automatics and Metrology, Lublin University of Technology, 20-618 Lublin, PolandDepartment of Electronic and Photonic Metrology, Wroclaw University of Science and Technology, 50-370 Wroclaw, PolandThermionic emission sources are key components of electron impact gas ion sources used in measuring instruments, such as mass spectrometers, ionization gauges, and apparatus for ionization cross-section measurements. The repeatability of the measurements taken with such instruments depends on the stability of the ion current, which is a function, among other things, of the electron beam current and electron accelerating voltage. In this paper, a laboratory thermionic electron beam current and accelerating voltage controller is presented, based on digital algorithm implementation. The average value of the percentage standard deviation of the emission current is 0.021%, and the maximum electron accelerating voltage change versus the emission current is smaller than 0.011% in the full operating range of the emission current. Its application as a trap current or emission current-regulated ion source power supply could be useful in many measuring instruments, such as in microelectromechanical system (MEMS) mass spectrometers as universal gas sensors, where a stable emission current and electron energy are needed.https://www.mdpi.com/1424-8220/21/8/2878thermionic emissionelectron accelerating voltageelectron beam currention currentcontrollerstandard deviation
spellingShingle Jarosław Sikora
Bartosz Kania
Janusz Mroczka
Thermionic Electron Beam Current and Accelerating Voltage Controller for Gas Ion Sources
Sensors
thermionic emission
electron accelerating voltage
electron beam current
ion current
controller
standard deviation
title Thermionic Electron Beam Current and Accelerating Voltage Controller for Gas Ion Sources
title_full Thermionic Electron Beam Current and Accelerating Voltage Controller for Gas Ion Sources
title_fullStr Thermionic Electron Beam Current and Accelerating Voltage Controller for Gas Ion Sources
title_full_unstemmed Thermionic Electron Beam Current and Accelerating Voltage Controller for Gas Ion Sources
title_short Thermionic Electron Beam Current and Accelerating Voltage Controller for Gas Ion Sources
title_sort thermionic electron beam current and accelerating voltage controller for gas ion sources
topic thermionic emission
electron accelerating voltage
electron beam current
ion current
controller
standard deviation
url https://www.mdpi.com/1424-8220/21/8/2878
work_keys_str_mv AT jarosławsikora thermionicelectronbeamcurrentandacceleratingvoltagecontrollerforgasionsources
AT bartoszkania thermionicelectronbeamcurrentandacceleratingvoltagecontrollerforgasionsources
AT januszmroczka thermionicelectronbeamcurrentandacceleratingvoltagecontrollerforgasionsources