Elimination of parasitic reflections for objects with high transparency in phase measuring deflectometry

In phase measuring deflectometry (PMD), the existence of parasitic reflections at the rear surface of transparent objects will lead to ‘ghosted’ fringe patterns, which results in phase error. Accurately extracting the phase from the 'ghosted' fringe patterns is considered as one of the mai...

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Main Authors: Tao Siwei, Yue Huimin, Chen Hongli, Wang Tianhe, Cai Jiawei, Wu Yuxiang, Liu yong
Format: Article
Language:English
Published: Elsevier 2019-12-01
Series:Results in Physics
Online Access:http://www.sciencedirect.com/science/article/pii/S2211379719323411
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author Tao Siwei
Yue Huimin
Chen Hongli
Wang Tianhe
Cai Jiawei
Wu Yuxiang
Liu yong
author_facet Tao Siwei
Yue Huimin
Chen Hongli
Wang Tianhe
Cai Jiawei
Wu Yuxiang
Liu yong
author_sort Tao Siwei
collection DOAJ
description In phase measuring deflectometry (PMD), the existence of parasitic reflections at the rear surface of transparent objects will lead to ‘ghosted’ fringe patterns, which results in phase error. Accurately extracting the phase from the 'ghosted' fringe patterns is considered as one of the main problems in PMD. Existing phase extraction methods still remain some drawbacks such as high cost of experiment equipment, the existence of ill-conditioned areas and difficulty in setting up a suitable threshold. In this paper, the envelope curve algorithm based on multi-frequency approach is proposed to eliminate parasitic reflections. The parasitic reflections were eliminated successfully. The PV and the RMS of the front phase error are 0.1085 rad and 0.0072 rad, and those of the rear phase error are 0.1345 rad and 0.0081 rad respectively in the simulation. Experiments also proved the effectiveness of the proposed algorithm. What’s more, the phase information of both the front and the rear surfaces can be attained simultaneously. The proposed algorithm could eliminate parasitic reflections successfully without destroying the tested object or special equipment. Factors which may influence the performance of this algorithm are discussed, and results showed that the proposed method is especially suitable for thick transparent object. Keywords: Parasitic reflections, Multi-frequency approach, Phase measuring deflectometry, Fringe analysis, Fringe demodulation
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spelling doaj.art-49375212e06e43d1b80a0688893e996a2022-12-22T00:43:39ZengElsevierResults in Physics2211-37972019-12-0115Elimination of parasitic reflections for objects with high transparency in phase measuring deflectometryTao Siwei0Yue Huimin1Chen Hongli2Wang Tianhe3Cai Jiawei4Wu Yuxiang5Liu yong6State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, PR ChinaState Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, PR China; Corresponding author.State Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, PR ChinaState Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, PR ChinaState Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, PR ChinaXidian University, School of Physics and Optoelectronic Engineering, Xi’an, Shanxi 710071, PR ChinaState Key Laboratory of Electronic Thin Films and Integrated Devices, School of Optoelectronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, PR ChinaIn phase measuring deflectometry (PMD), the existence of parasitic reflections at the rear surface of transparent objects will lead to ‘ghosted’ fringe patterns, which results in phase error. Accurately extracting the phase from the 'ghosted' fringe patterns is considered as one of the main problems in PMD. Existing phase extraction methods still remain some drawbacks such as high cost of experiment equipment, the existence of ill-conditioned areas and difficulty in setting up a suitable threshold. In this paper, the envelope curve algorithm based on multi-frequency approach is proposed to eliminate parasitic reflections. The parasitic reflections were eliminated successfully. The PV and the RMS of the front phase error are 0.1085 rad and 0.0072 rad, and those of the rear phase error are 0.1345 rad and 0.0081 rad respectively in the simulation. Experiments also proved the effectiveness of the proposed algorithm. What’s more, the phase information of both the front and the rear surfaces can be attained simultaneously. The proposed algorithm could eliminate parasitic reflections successfully without destroying the tested object or special equipment. Factors which may influence the performance of this algorithm are discussed, and results showed that the proposed method is especially suitable for thick transparent object. Keywords: Parasitic reflections, Multi-frequency approach, Phase measuring deflectometry, Fringe analysis, Fringe demodulationhttp://www.sciencedirect.com/science/article/pii/S2211379719323411
spellingShingle Tao Siwei
Yue Huimin
Chen Hongli
Wang Tianhe
Cai Jiawei
Wu Yuxiang
Liu yong
Elimination of parasitic reflections for objects with high transparency in phase measuring deflectometry
Results in Physics
title Elimination of parasitic reflections for objects with high transparency in phase measuring deflectometry
title_full Elimination of parasitic reflections for objects with high transparency in phase measuring deflectometry
title_fullStr Elimination of parasitic reflections for objects with high transparency in phase measuring deflectometry
title_full_unstemmed Elimination of parasitic reflections for objects with high transparency in phase measuring deflectometry
title_short Elimination of parasitic reflections for objects with high transparency in phase measuring deflectometry
title_sort elimination of parasitic reflections for objects with high transparency in phase measuring deflectometry
url http://www.sciencedirect.com/science/article/pii/S2211379719323411
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