| Summary: | A theoretical and experimental investigation on femtosecond laser multi-pulse scribing of copper will provide valuable insights for improving laser machining quality in practical applications. This study enhanced a two-temperature model by incorporating parameters that vary with temperature and introducing a novel phase transition treatment which encompasses both melting and superheating phenomena. It was found that the variations of lattice and electron temperatures after laser irradiation can be categorized into distinct stages exhibiting diverse trends, and phase explosion emerges as the predominant mechanism governing material removal in single-pulse simulation. The comparison between experimental and simulated groove depths of multi-pulse scribing with different laser peak fluences F0 and repeated exposures per point N revealed a nearly linear increase in both simulation and experimental results as N increases at different F0. Finally, a modeling modification method considering the effect of ablation front progress on laser absorption was proposed. The modified simulation results showed that simulation errors are reduced by 9.2% to 11.3% referring to the original errors.
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