Ice lithography using tungsten hexacarbonyl

Ice lithography using tungsten hexacarbonyl

Ice lithography (IL) fabricates 2D and 3D patterns using electron-solid interaction principle. Herein, we report IL patterning of the negative tone metalorganic precursor. The precursor is condensed at 80 K. It is then patterned using a 5–20 keV electron beam. The pattern thickness and surface rough...

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Bibliographic Details
Main Authors: Rubaiyet I. Haque, Affan Kaysa Waafi, Bingdong Chang, Anpan Han
Format: Article
Language:English
Published: Elsevier 2023-04-01
Series:Micro and Nano Engineering
Subjects:
Ice lithography
Tungsten hexacarbonyl
Electron beam lithography
Nanofabrication
Organic ice
Online Access:http://www.sciencedirect.com/science/article/pii/S2590007223000011

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