Detection of Volatile Organic Compounds by Using MEMS Sensors

We report on the deployment of MEMS static bifurcation (DC) sensors for the detection of volatile organic compounds (VOCs): hydrogen sulfide and formaldehyde. We demonstrate a sensor that can detect as low as a few ppm of hydrogen sulfide. We also demonstrate a sensor array that can selectively dete...

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Main Authors: Mohamed Arabi, Majed Alghamdi, Khalid Kabel, Ahmed Labena, Walaa S. Gado, Bhoomi Mavani, Alison J. Scott, Alexander Penlidis, Mustafa Yavuz, Eihab Abdel-Rahman
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/22/11/4102
_version_ 1797491677115449344
author Mohamed Arabi
Majed Alghamdi
Khalid Kabel
Ahmed Labena
Walaa S. Gado
Bhoomi Mavani
Alison J. Scott
Alexander Penlidis
Mustafa Yavuz
Eihab Abdel-Rahman
author_facet Mohamed Arabi
Majed Alghamdi
Khalid Kabel
Ahmed Labena
Walaa S. Gado
Bhoomi Mavani
Alison J. Scott
Alexander Penlidis
Mustafa Yavuz
Eihab Abdel-Rahman
author_sort Mohamed Arabi
collection DOAJ
description We report on the deployment of MEMS static bifurcation (DC) sensors for the detection of volatile organic compounds (VOCs): hydrogen sulfide and formaldehyde. We demonstrate a sensor that can detect as low as a few ppm of hydrogen sulfide. We also demonstrate a sensor array that can selectively detect formaldehyde in the presence of benzene, a closely related interferent. Toward that end, we investigate the sensitivity and selectivity of two detector polymers—polyaniline (PANI) and poly (2,5-dimethyl aniline) (P25DMA)—to both gases. A semiautomatic method is developed to functionalize individual sensors and sensor arrays with the detector polymers. We found that the sensor array can selectively sense 1 ppm of formaldehyde in the presence of benzene.
first_indexed 2024-03-10T00:52:45Z
format Article
id doaj.art-49ba5b70a4534345a505f979f3ef5f92
institution Directory Open Access Journal
issn 1424-8220
language English
last_indexed 2024-03-10T00:52:45Z
publishDate 2022-05-01
publisher MDPI AG
record_format Article
series Sensors
spelling doaj.art-49ba5b70a4534345a505f979f3ef5f922023-11-23T14:48:42ZengMDPI AGSensors1424-82202022-05-012211410210.3390/s22114102Detection of Volatile Organic Compounds by Using MEMS SensorsMohamed Arabi0Majed Alghamdi1Khalid Kabel2Ahmed Labena3Walaa S. Gado4Bhoomi Mavani5Alison J. Scott6Alexander Penlidis7Mustafa Yavuz8Eihab Abdel-Rahman9Department of Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, CanadaNational Center for Electronics and Defense Systems, King Abdulazaiz City for Science and Technology (KACST), Riyadh 12354, Saudi ArabiaDepartment of Petroleum Applications, Egyptian Petroleum Research Institute (EPRI), Cairo 11727, EgyptDepartment of Processes Design & Development, Egyptian Petroleum Research Institute (EPRI), Cairo 11727, EgyptDepartment of Petrochemicals, Egyptian Petroleum Research Institute (EPRI), Cairo 11727, EgyptDepartment of Chemical Engineering, Institute for Polymer Research (IPR), University of Waterloo, Waterloo, ON N2L 3G1, CanadaDepartment of Chemical Engineering, Institute for Polymer Research (IPR), University of Waterloo, Waterloo, ON N2L 3G1, CanadaDepartment of Chemical Engineering, Institute for Polymer Research (IPR), University of Waterloo, Waterloo, ON N2L 3G1, CanadaDepartment of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, ON N2L 3G1, CanadaDepartment of Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, CanadaWe report on the deployment of MEMS static bifurcation (DC) sensors for the detection of volatile organic compounds (VOCs): hydrogen sulfide and formaldehyde. We demonstrate a sensor that can detect as low as a few ppm of hydrogen sulfide. We also demonstrate a sensor array that can selectively detect formaldehyde in the presence of benzene, a closely related interferent. Toward that end, we investigate the sensitivity and selectivity of two detector polymers—polyaniline (PANI) and poly (2,5-dimethyl aniline) (P25DMA)—to both gases. A semiautomatic method is developed to functionalize individual sensors and sensor arrays with the detector polymers. We found that the sensor array can selectively sense 1 ppm of formaldehyde in the presence of benzene.https://www.mdpi.com/1424-8220/22/11/4102electrostaticbifurcationMEMSVOCs
spellingShingle Mohamed Arabi
Majed Alghamdi
Khalid Kabel
Ahmed Labena
Walaa S. Gado
Bhoomi Mavani
Alison J. Scott
Alexander Penlidis
Mustafa Yavuz
Eihab Abdel-Rahman
Detection of Volatile Organic Compounds by Using MEMS Sensors
Sensors
electrostatic
bifurcation
MEMS
VOCs
title Detection of Volatile Organic Compounds by Using MEMS Sensors
title_full Detection of Volatile Organic Compounds by Using MEMS Sensors
title_fullStr Detection of Volatile Organic Compounds by Using MEMS Sensors
title_full_unstemmed Detection of Volatile Organic Compounds by Using MEMS Sensors
title_short Detection of Volatile Organic Compounds by Using MEMS Sensors
title_sort detection of volatile organic compounds by using mems sensors
topic electrostatic
bifurcation
MEMS
VOCs
url https://www.mdpi.com/1424-8220/22/11/4102
work_keys_str_mv AT mohamedarabi detectionofvolatileorganiccompoundsbyusingmemssensors
AT majedalghamdi detectionofvolatileorganiccompoundsbyusingmemssensors
AT khalidkabel detectionofvolatileorganiccompoundsbyusingmemssensors
AT ahmedlabena detectionofvolatileorganiccompoundsbyusingmemssensors
AT walaasgado detectionofvolatileorganiccompoundsbyusingmemssensors
AT bhoomimavani detectionofvolatileorganiccompoundsbyusingmemssensors
AT alisonjscott detectionofvolatileorganiccompoundsbyusingmemssensors
AT alexanderpenlidis detectionofvolatileorganiccompoundsbyusingmemssensors
AT mustafayavuz detectionofvolatileorganiccompoundsbyusingmemssensors
AT eihababdelrahman detectionofvolatileorganiccompoundsbyusingmemssensors