Detection of Volatile Organic Compounds by Using MEMS Sensors

Detection of Volatile Organic Compounds by Using MEMS Sensors

We report on the deployment of MEMS static bifurcation (DC) sensors for the detection of volatile organic compounds (VOCs): hydrogen sulfide and formaldehyde. We demonstrate a sensor that can detect as low as a few ppm of hydrogen sulfide. We also demonstrate a sensor array that can selectively dete...

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Bibliographic Details
Main Authors: Mohamed Arabi, Majed Alghamdi, Khalid Kabel, Ahmed Labena, Walaa S. Gado, Bhoomi Mavani, Alison J. Scott, Alexander Penlidis, Mustafa Yavuz, Eihab Abdel-Rahman
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Sensors
Subjects:
electrostatic
bifurcation
MEMS
VOCs
Online Access:https://www.mdpi.com/1424-8220/22/11/4102

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