Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates

In this study, an AlGaN/GaN high-electron-mobility transistor (HEMT) was grown through metal organic chemical vapor deposition on a Qromis Substrate Technology (QST). The GaN on the QST device exhibited a superior heat dissipation performance to the GaN on a Si device because of the higher thermal c...

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Main Authors: Chong-Rong Huang, Hsien-Chin Chiu, Chia-Hao Liu, Hsiang-Chun Wang, Hsuan-Ling Kao, Chih-Tien Chen, Kuo-Jen Chang
Format: Article
Language:English
Published: MDPI AG 2021-10-01
Series:Membranes
Subjects:
Online Access:https://www.mdpi.com/2077-0375/11/11/848
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author Chong-Rong Huang
Hsien-Chin Chiu
Chia-Hao Liu
Hsiang-Chun Wang
Hsuan-Ling Kao
Chih-Tien Chen
Kuo-Jen Chang
author_facet Chong-Rong Huang
Hsien-Chin Chiu
Chia-Hao Liu
Hsiang-Chun Wang
Hsuan-Ling Kao
Chih-Tien Chen
Kuo-Jen Chang
author_sort Chong-Rong Huang
collection DOAJ
description In this study, an AlGaN/GaN high-electron-mobility transistor (HEMT) was grown through metal organic chemical vapor deposition on a Qromis Substrate Technology (QST). The GaN on the QST device exhibited a superior heat dissipation performance to the GaN on a Si device because of the higher thermal conductivity of the QST substrate. Thermal imaging analysis indicated that the temperature variation of the GaN on the QST device was 4.5 °C and that of the GaN on the Si device was 9.2 °C at a drain-to-source current (<i>I</i><sub>DS</sub>) of 300 mA/mm following 50 s of operation. Compared with the GaN HEMT on the Si device, the GaN on the QST device exhibited a lower <i>I</i><sub>DS</sub> degradation at high temperatures (17.5% at 400 K). The QST substrate is suitable for employment in different temperature environments because of its high thermal stability.
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spelling doaj.art-49ca62e52e804ee3b70050b53afafe782023-11-23T00:19:30ZengMDPI AGMembranes2077-03752021-10-01111184810.3390/membranes11110848Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN SubstratesChong-Rong Huang0Hsien-Chin Chiu1Chia-Hao Liu2Hsiang-Chun Wang3Hsuan-Ling Kao4Chih-Tien Chen5Kuo-Jen Chang6Department of Electronics Engineering, Chang Gung University, Taoyuan 333, TaiwanDepartment of Electronics Engineering, Chang Gung University, Taoyuan 333, TaiwanDepartment of Electronics Engineering, Chang Gung University, Taoyuan 333, TaiwanDepartment of Electronics Engineering, Chang Gung University, Taoyuan 333, TaiwanDepartment of Electronics Engineering, Chang Gung University, Taoyuan 333, TaiwanNational Chung-Shan Institute of Science and Technology, Materials and Electro-Optics Research Division, Taoyuan 333, TaiwanNational Chung-Shan Institute of Science and Technology, Materials and Electro-Optics Research Division, Taoyuan 333, TaiwanIn this study, an AlGaN/GaN high-electron-mobility transistor (HEMT) was grown through metal organic chemical vapor deposition on a Qromis Substrate Technology (QST). The GaN on the QST device exhibited a superior heat dissipation performance to the GaN on a Si device because of the higher thermal conductivity of the QST substrate. Thermal imaging analysis indicated that the temperature variation of the GaN on the QST device was 4.5 °C and that of the GaN on the Si device was 9.2 °C at a drain-to-source current (<i>I</i><sub>DS</sub>) of 300 mA/mm following 50 s of operation. Compared with the GaN HEMT on the Si device, the GaN on the QST device exhibited a lower <i>I</i><sub>DS</sub> degradation at high temperatures (17.5% at 400 K). The QST substrate is suitable for employment in different temperature environments because of its high thermal stability.https://www.mdpi.com/2077-0375/11/11/848QST substrateback-barrier layerhigh thermal conductivity
spellingShingle Chong-Rong Huang
Hsien-Chin Chiu
Chia-Hao Liu
Hsiang-Chun Wang
Hsuan-Ling Kao
Chih-Tien Chen
Kuo-Jen Chang
Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates
Membranes
QST substrate
back-barrier layer
high thermal conductivity
title Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates
title_full Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates
title_fullStr Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates
title_full_unstemmed Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates
title_short Characteristic Analysis of AlGaN/GaN HEMT with Composited Buffer Layer on High-Heat Dissipation Poly-AlN Substrates
title_sort characteristic analysis of algan gan hemt with composited buffer layer on high heat dissipation poly aln substrates
topic QST substrate
back-barrier layer
high thermal conductivity
url https://www.mdpi.com/2077-0375/11/11/848
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