A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path Generation
This work pertains to the design of a cantilever-based piezoelectric MEMS device that is capable of generating arbitrary paths of its tip. The conceived device consists of a pair of rigidly coupled piezoelectric bimorph cantilevers, and a theoretical model is developed for the analytical evaluation...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2022-09-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/13/9/1514 |
| _version_ | 1797484600527683584 |
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| author | Fabio Botta Andrea Rossi Nicola Pio Belfiore |
| author_facet | Fabio Botta Andrea Rossi Nicola Pio Belfiore |
| author_sort | Fabio Botta |
| collection | DOAJ |
| description | This work pertains to the design of a cantilever-based piezoelectric MEMS device that is capable of generating arbitrary paths of its tip. The conceived device consists of a pair of rigidly coupled piezoelectric bimorph cantilevers, and a theoretical model is developed for the analytical evaluation of the proper voltage distribution to be supplied to the inner and outer electrodes of each piezoelectric actuator, in order to drive the tip along any desired trajectory. Such a device could be appealing in some microsurgical operations, i.e., the unclogging of arteries, endoluminal treatment of obstructive lesions, but also as a 2D micropositioning stage, etc. Theoretical predictions of voltage versus time that allow several pathways such as circles, ellipses, spirals, etc., to be accomplished have been verified with multiphysics FEM simulations and the numerical outcomes seem to corroborate the proposed model. |
| first_indexed | 2024-03-09T23:07:42Z |
| format | Article |
| id | doaj.art-4a2eff821d9a4d42929e458f28daee55 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-09T23:07:42Z |
| publishDate | 2022-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-4a2eff821d9a4d42929e458f28daee552023-11-23T17:50:47ZengMDPI AGMicromachines2072-666X2022-09-01139151410.3390/mi13091514A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path GenerationFabio Botta0Andrea Rossi1Nicola Pio Belfiore2Department of Industrial, Electronic and Mechanical Engineering, Roma Tre University, 00146 Roma, ItalyDepartment of Industrial, Electronic and Mechanical Engineering, Roma Tre University, 00146 Roma, ItalyDepartment of Industrial, Electronic and Mechanical Engineering, Roma Tre University, 00146 Roma, ItalyThis work pertains to the design of a cantilever-based piezoelectric MEMS device that is capable of generating arbitrary paths of its tip. The conceived device consists of a pair of rigidly coupled piezoelectric bimorph cantilevers, and a theoretical model is developed for the analytical evaluation of the proper voltage distribution to be supplied to the inner and outer electrodes of each piezoelectric actuator, in order to drive the tip along any desired trajectory. Such a device could be appealing in some microsurgical operations, i.e., the unclogging of arteries, endoluminal treatment of obstructive lesions, but also as a 2D micropositioning stage, etc. Theoretical predictions of voltage versus time that allow several pathways such as circles, ellipses, spirals, etc., to be accomplished have been verified with multiphysics FEM simulations and the numerical outcomes seem to corroborate the proposed model.https://www.mdpi.com/2072-666X/13/9/1514MEMSpiezoelectricpath generator |
| spellingShingle | Fabio Botta Andrea Rossi Nicola Pio Belfiore A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path Generation Micromachines MEMS piezoelectric path generator |
| title | A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path Generation |
| title_full | A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path Generation |
| title_fullStr | A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path Generation |
| title_full_unstemmed | A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path Generation |
| title_short | A Cantilever-Based Piezoelectric MEMS for Arbitrary XY Path Generation |
| title_sort | cantilever based piezoelectric mems for arbitrary xy path generation |
| topic | MEMS piezoelectric path generator |
| url | https://www.mdpi.com/2072-666X/13/9/1514 |
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