High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process

This paper proposes a design method to reduce cogging torque and torque ripple in the concentrated winding of IPMSMs (Interior Permanent Magnet Synchronous Motors) used in motors for the semiconductor ETCH process. IPMSMs can utilize reluctance torque through the difference in inductance between the...

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Main Authors: Do-Hyeon Choi, In-Jun Yang, Min-Ki Hong, Dong-Hoon Jung, Won-Ho Kim
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Machines
Subjects:
Online Access:https://www.mdpi.com/2075-1702/11/11/991
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author Do-Hyeon Choi
In-Jun Yang
Min-Ki Hong
Dong-Hoon Jung
Won-Ho Kim
author_facet Do-Hyeon Choi
In-Jun Yang
Min-Ki Hong
Dong-Hoon Jung
Won-Ho Kim
author_sort Do-Hyeon Choi
collection DOAJ
description This paper proposes a design method to reduce cogging torque and torque ripple in the concentrated winding of IPMSMs (Interior Permanent Magnet Synchronous Motors) used in motors for the semiconductor ETCH process. IPMSMs can utilize reluctance torque through the difference in inductance between the d axis and q axis, but they are at a disadvantage in terms of reducing cogging torque while tapering the rotor and stator to reduce torque ripple. In addition, the existing single tapering can push the permanent magnets into the rotor. If the rotor’s permanent magnets are embedded, the magnetic reluctance will increase, and the overall performance of the motor will decrease. However, an optimum design method was derived in which the magnets do not move during rotor tapering. This geometric design is an optimum design method that reduces cogging torque and torque ripple. This paper compares and analyzes four models, the concentrated winding model, distributed winding model, conventional tapering model, and separated tapering model, using 2D and 3D finite element analysis (FEA).
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spelling doaj.art-4a50acd4d0bb4d0ebb1a65ce8668baba2023-11-24T14:52:53ZengMDPI AGMachines2075-17022023-10-01111199110.3390/machines11110991High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH ProcessDo-Hyeon Choi0In-Jun Yang1Min-Ki Hong2Dong-Hoon Jung3Won-Ho Kim4Department of Next Generation Smart Energy System Convergence, Gachon University, Seongnam 13120, Republic of KoreaDepartment of Electrical Engineering, Hanyang University, Seoul 04763, Republic of KoreaDepartment of Electrical Engineering, Hanyang University, Seoul 04763, Republic of KoreaDepartment of Mechanical, Automotive and Robot Engineering, Halla University, Wonju 26404, Republic of KoreaDepartment of Electrical Engineering, Gachon University, Seongnam 13120, Republic of KoreaThis paper proposes a design method to reduce cogging torque and torque ripple in the concentrated winding of IPMSMs (Interior Permanent Magnet Synchronous Motors) used in motors for the semiconductor ETCH process. IPMSMs can utilize reluctance torque through the difference in inductance between the d axis and q axis, but they are at a disadvantage in terms of reducing cogging torque while tapering the rotor and stator to reduce torque ripple. In addition, the existing single tapering can push the permanent magnets into the rotor. If the rotor’s permanent magnets are embedded, the magnetic reluctance will increase, and the overall performance of the motor will decrease. However, an optimum design method was derived in which the magnets do not move during rotor tapering. This geometric design is an optimum design method that reduces cogging torque and torque ripple. This paper compares and analyzes four models, the concentrated winding model, distributed winding model, conventional tapering model, and separated tapering model, using 2D and 3D finite element analysis (FEA).https://www.mdpi.com/2075-1702/11/11/991permanent motortorque rippletaperingIPMSMETCH processsemiconductor
spellingShingle Do-Hyeon Choi
In-Jun Yang
Min-Ki Hong
Dong-Hoon Jung
Won-Ho Kim
High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process
Machines
permanent motor
torque ripple
tapering
IPMSM
ETCH process
semiconductor
title High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process
title_full High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process
title_fullStr High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process
title_full_unstemmed High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process
title_short High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process
title_sort high speed design with separated tapering for reducing cogging torque and torque ripple of a 3 kw dry vacuum pump motor for the etch process
topic permanent motor
torque ripple
tapering
IPMSM
ETCH process
semiconductor
url https://www.mdpi.com/2075-1702/11/11/991
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