High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process

High-Speed Design with Separated Tapering for Reducing Cogging Torque and Torque Ripple of a 3 kW Dry Vacuum Pump Motor for the ETCH Process

This paper proposes a design method to reduce cogging torque and torque ripple in the concentrated winding of IPMSMs (Interior Permanent Magnet Synchronous Motors) used in motors for the semiconductor ETCH process. IPMSMs can utilize reluctance torque through the difference in inductance between the...

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Bibliographic Details
Main Authors: Do-Hyeon Choi, In-Jun Yang, Min-Ki Hong, Dong-Hoon Jung, Won-Ho Kim
Format: Article
Language:English
Published: MDPI AG 2023-10-01
Series:Machines
Subjects:
permanent motor
torque ripple
tapering
IPMSM
ETCH process
semiconductor
Online Access:https://www.mdpi.com/2075-1702/11/11/991

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