Lateral Extensional Mode Piezoelectric ZnO-on-Nickel RF MEMS Resonators for Back-End-of-Line Integration

Lateral Extensional Mode Piezoelectric ZnO-on-Nickel RF MEMS Resonators for Back-End-of-Line Integration

High motional resistance and incompatibility with post-CMOS fabrication due to thermal budget constraints are imperative issues associated with the back-end-of-line integration of lateral extensional vibrating micromechanical resonators. This paper presents piezoelectric ZnO-on-nickel resonators as...

Full description

Bibliographic Details
Main Authors: Adnan Zaman, Abdulrahman Alsolami, Mian Wei, Ivan Rivera, Masoud Baghelani, Jing Wang
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Micromachines
Subjects:
electroplated nickel
lateral extensional contour mode
piezoelectric transducer
back-end-of-line integration
Online Access:https://www.mdpi.com/2072-666X/14/5/1089

Similar Items

Similar Items