In-Situ Depth Measurement of Laser Micromachining

In-Situ Depth Measurement of Laser Micromachining

Precision laser micromachining plays an important role in the biomedical, electronics, and material processing industries. During laser drilling, precision depth detection with micrometer-level resolution is required, particularly with blind-hole or heterogeneous structures. We present an optical de...

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Bibliographic Details
Main Authors: Xiaoming Chen, Ying Xu, Nan-Kuang Chen, Shannon Shy, Hsiang-Chen Chui
Format: Article
Language:English
Published: MDPI AG 2021-11-01
Series:Photonics
Subjects:
laser machining
depth measurement
confocal structure
Online Access:https://www.mdpi.com/2304-6732/8/11/493

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