Hybrid polymer-titania waveguides for highly integrated circuits

We present an innovative waveguide based on the hybridization of a titanium dioxide nano-waveguide within a polymer strip. Through simulations and design we demonstrate that the waveguide sustains principally the quasi-TM fundamental mode and that even in tight bends (radius smaller than 2 μm) light...

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Bibliographic Details
Main Authors: Doughan Isaac, Oyemakinwa Kehinde, Ovaskainen Olli, Roussey Matthieu
Format: Article
Language:English
Published: EDP Sciences 2022-01-01
Series:EPJ Web of Conferences
Online Access:https://www.epj-conferences.org/articles/epjconf/pdf/2022/10/epjconf_eosam2022_01006.pdf
Description
Summary:We present an innovative waveguide based on the hybridization of a titanium dioxide nano-waveguide within a polymer strip. Through simulations and design we demonstrate that the waveguide sustains principally the quasi-TM fundamental mode and that even in tight bends (radius smaller than 2 μm) light remains confined in the titania layer. Such a waveguide, in addition of enabling low loss propagation is a way towards efficient evanescent sensing in highly integrated scheme, i.e., small footprint. We also show that the fabrication, here based on electron beam lithography and atomic layer deposition, can be extended easily to large scale manufacturing using nanoimprinting technology.
ISSN:2100-014X